Provided is an information processing device including at least one processor which executes an obtaining process for obtaining sensor data transmitted from each of sensors included in a sensor group, a converting process for converting the sensor data, which has been obtained in the obtaining process, into a particular format, and a providing process for providing, to main equipment, the sensor data whose format has been converted in the converting process.

A method includes receiving topic names from a metrology interface device, where the topic names correspond to data generated by metrology devices associated with a manufacturing operation. The method also includes accessing a data stream from the metrology interface device. The data stream includes converted metrology data (in a common format) from the metrology devices and corresponding topic names. The method further includes extracting first converted metrology data from the data stream based on a first topic name of the topic names. The first converted metrology data is generated by converting first metrology data from a first metrology device of the metrology devices to the first converted metrology data having the common format. The method also includes comparing the first converted metrology data to a specification, detecting a condition based on the comparison, and sending a command to a manufacturing device based on the condition.

A method includes receiving topic names from a metrology interface device, where the topic names correspond to data generated by metrology devices associated with a manufacturing operation. The method also includes accessing a data stream from the metrology interface device. The data stream includes converted metrology data (in a common format) from the metrology devices and corresponding topic names. The method further includes extracting first converted metrology data from the data stream based on a first topic name of the topic names. The first converted metrology data is generated by converting first metrology data from a first metrology device of the metrology devices to the first converted metrology data having the common format. The method also includes comparing the first converted metrology data to a specification, detecting a condition based on the comparison, and sending a command to a manufacturing device based on the condition.