A compensation quantity acquisition device acquires vibration of the movement target in a second axis direction, orthogonal to the first axis direction when the movement target is moved in the first axis direction, acquires a positional frequency characteristic by performing Fourier transformation on the acquired vibration in the second axis direction, performs inverse Fourier transformation on the positional frequency characteristic from which the component of position independent frequency in the second axis direction (that occurs independently of a position of the movement target in the first axis direction) has been removed, to recover the vibration of the movement target in the second axial direction as position dependent vibration, and acquires positional compensation quantity of the movement target in the second axis direction that cancels the position dependent vibration.

A compensation quantity acquisition device acquires vibration of the movement target in a second axis direction, orthogonal to the first axis direction when the movement target is moved in the first axis direction, acquires a positional frequency characteristic by performing Fourier transformation on the acquired vibration in the second axis direction, performs inverse Fourier transformation on the positional frequency characteristic from which the component of position independent frequency in the second axis direction (that occurs independently of a position of the movement target in the first axis direction) has been removed, to recover the vibration of the movement target in the second axial direction as position dependent vibration, and acquires positional compensation quantity of the movement target in the second axis direction that cancels the position dependent vibration.