A method of teaching a robot includes: a swinging step of causing a hand to swing about a predetermined pivot, which is on an axis perpendicular to an optical axis of a sensor beam, to scan a target in a horizontal direction of the sensor beam; a determining step of determining whether or not the target has coincided with a position along a central axis of the hand in its longitudinal direction based on a detection signal of a mapping sensor, the detection signal having changed owing to the swinging of the hand; and a shifting step of, if it is determined in the determining step that the target has not coincided with the position, calculating an offset amount of the hand based on the detection signal of the mapping sensor, the detection signal having changed owing to the swinging of the hand, and causing the hand to shift to either right or left along the optical axis of the sensor beam in accordance with the calculated offset amount.

A method for checking a tool uses a device with a light emitter for beam emission for tool scanning and with a beam receiver for beam reception and for outputting a shadow signal; and an evaluation unit for processing the shadow signal; rotation of the tool; moving the tool until it reaches a starting position in which the blade dips into the beam and shades this such that a threshold of a range of the evaluation unit is reached or undershot; moving the tool, starting from the starting position, out of the beam and registering the shadow signal; ascertaining that the shadow signal for a cutting edge does not fall below the lower switching threshold or exceed the upper switching threshold such that a shadow signal lies above the lower and below the upper switching threshold; wherein the feed is determined in proportion to a measurement range.

A substrate transfer robot, first and second sensors are provided in a hand such that a planar-view intersection point of optical axes is located on a center of a substrate when the hand holds the substrate in planar view, and a control device operates an arm, scans a target placed at a teaching position with the first and second sensors, and acquires the teaching position when the target is located at the planar-view intersection point of the optical axes.

A processing unit for measuring and controlling a rotary-driven tool, wherein the processing unit is connectable to a light barrier arrangement, which comprises a light-transmitting unit and a light-receiving unit, wherein the processing unit is configured to receive from the light-receiving unit signals that are at least approximately proportional to shading generated by the rotary-driven tool and/or at least one cutting edge of the rotary-driven tool at a first measuring position. The processing unit is further configured to evaluate the signals received and to transmit control signals to the light barrier arrangement, wherein the evaluation of the signals received by the processing unit comprises the following steps: determination of an interference signal component and/or a useful signal component of the received signal; and provision of information about the useful signal component, the interference signal component and/or the received signal for forwarding to a numerical controller of a machine tool.

A substrate transfer robot, first and second sensors are provided in a hand such that a planar-view intersection point of optical axes is located on a center of a substrate when the hand holds the substrate in planar view, and a control device operates an arm, scans a target placed at a teaching position with the first and second sensors, and acquires the teaching position when the target is located at the planar-view intersection point of the optical axes.

A system includes a computing device that generates at least one process script for the modification to a material substrate and at least one pattern script that corresponds to the process script. The computing device also merges the process script with the pattern script and generates a plurality of command signals that are based on the merged process and pattern scripts. An energy source generates a plurality of light beams based on the generated command signal(s). At least one modulating component modulates the generated light beams based on generated command signal(s). A waveform apparatus generates at least one waveform signal to customize the generated light beams based on the generated command signal(s). A motion control apparatus controls at least one parameter of the light beams based on the generated command signal(s).

A method for checking a tool uses a device with a light emitter for beam emission for tool scanning and with a beam receiver for beam reception and for outputting a shadow signal; and an evaluation unit for processing the shadow signal; rotation of the tool; moving the tool until it reaches a starting position in which the blade dips into the beam and shades this such that a threshold of a range of the evaluation unit is reached or undershot; moving the tool, starting from the starting position, out of the beam and registering the shadow signal; ascertaining that the shadow signal for a cutting edge does not fall below the lower switching threshold or exceed the upper switching threshold such that a shadow signal lies above the lower and below the upper switching threshold; wherein the feed is determined in proportion to a measurement range.

A processing unit for measuring and controlling a rotary-driven tool, wherein the processing unit is connectable to a light barrier arrangement, which comprises a light-transmitting unit and a light-receiving unit, wherein the processing unit is configured to receive from the light-receiving unit signals that are at least approximately proportional to shading generated by the rotary-driven tool and/or at least one cutting edge of the rotary-driven tool at a first measuring position. The processing unit is further configured to evaluate the signals received and to transmit control signals to the light barrier arrangement, wherein the evaluation of the signals received by the processing unit comprises the following steps: determination of an interference signal component and/or a useful signal component of the received signal; and provision of information about the useful signal component, the interference signal component and/or the received signal for forwarding to a numerical controller of a machine tool.

A system includes a computing device that generates at least one process script for the modification to a material substrate and at least one pattern script that corresponds to the process script. The computing device also merges the process script with the pattern script and generates a plurality of command signals that are based on the merged process and pattern scripts. An energy source generates a plurality of light beams based on the generated command signal(s). At least one modulating component modulates the generated light beams based on generated command signal(s). A waveform apparatus generates at least one waveform signal to customize the generated light beams based on the generated command signal(s). A motion control apparatus controls at least one parameter of the light beams based on the generated command signal(s).