A method for aligning a workpiece in a working space of a machine tool having a numerical control system uses a probe. 3D models of the working space, probe, and workpiece are virtually displayed. The workpiece is positioned in the working space and the virtual workpiece is positioned in the virtual working space so that there is an initial coincidence between positions thereof. The probe is manually positioned relative to the workpiece, wherein a planned probing point and probing direction are selected based on a minimum distance of the virtual probe from the virtual workpiece, and are displayed. Enabling of the probing is based on quality of the planned probing point, and, when enabled, a probing operation is triggered, and coordinates of a probing point are determined. The position of the workpiece is recalculated using these coordinates, and the position of the virtual workpiece is updated.

The purpose of the present invention is to provide a recipe creation device, with the goal of using past recipe data in order to highly efficiently create recipes. As an embodiment with which to achieve this goal, there is provided a recipe creation device comprising an arithmetic processing device that, on the basis of design data for a semiconductor element, establishes measurement conditions or inspection conditions by a semiconductor measurement device or a semiconductor inspection device, wherein the arithmetic processing device is configured to be able to access a database in which the measurement conditions or inspection conditions, and the pattern information of the semiconductor element, are stored in associated form, and the measurement conditions or inspection conditions are selected through a search using pattern information of the semiconductor element.

Embodiments of the present disclosure provide systems and methods for enhancing the semiconductor manufacturing yield. Embodiments of the present disclosure provide a yield improvement system. The system comprises a training tool configured to generate training data based on receipt of one or more verified results of an inspection of a first substrate. The system also comprises a point determination tool configured to determine one or more regions on a second substrate to inspect based on the training data, weak point information for the second substrate, and an exposure recipe for a scanner of the second substrate.

There is provided a server that includes: an inspection item/main part correspondence table in which inspection items of the work machine and main parts of the work machine are associated; an inspection item list acquisition unit acquiring an inspection item list of the inspection target machine based on information about the inspection target machine received from the terminal; and a main part list acquisition unit acquiring a main part list in which the service parts are enumerated, being associated with the inspection items of the inspection target machine, based on the inspection item/main part correspondence table. The main part list acquisition unit transmits the acquired main part list to the terminal via the communication circuit as the selection information about the service parts.

A method for determining an altered measurement strategy for measurement of a measurement object using a coordinate measuring machine includes measuring the measurement object according to an initial measurement strategy. The method includes determining a measurement quality of the measurement. The method includes, in response to the measurement quality being greater than a predetermined target minimum measurement quality, altering the initial measurement strategy to produce the altered measurement strategy. The altering is performed such that at least one of time required to measure the measurement object in accordance with the altered measurement strategy is reduced, computational outlay required to measure the measurement object in accordance with the altered measurement strategy is reduced, and data storage capacity required to measure the measurement object in accordance with the altered measurement strategy is reduced.

A method for determining a measurement strategy for measuring a measurement object includes determining a test element of the measurement object. There is an automated test for the test element as to whether there is an applicable measurement rule in a measurement rule set of measurement rules defined in advance. An applicable measurement rule is added to a new measurement strategy or the test element-specific measurement rule of an existing measurement strategy is altered based on an applicable measurement rule. The measurement rules of the measurement rule set are determined by virtue of a measurement rule and at least one test criterion in respect of the applicability thereof being set for a test element by a user or in (partly) automated fashion. The measurement rule defines at least one parameter for measuring the test element.

A component testing plan considers both distinguishable components and undistinguishable components for each of the distinguishable components. In addition to distinguishable and undistinguishable components, inputs to the system include a level of customer demand, using component-based demand forecasting, and what test types are to be performed. The system then determines a set of combinatorial test options for each of the test types and a cycle time for each combinatorial test option. The system then cognitively develops a component testing plan including a listing of combinatorial test(s) of the set of combinatorial test options for each test type to be performed and how many times to perform each combinatorial test(s) on a testing machine with a known capacity in order to minimize a total cycle time for all of the test types and a number of the testing machine needed; and implementing the component testing plan on a set of test components on a production line.

The purpose of the present invention is to provide a recipe creation device, with the goal of using past recipe data in order to highly efficiently create recipes. As an embodiment with which to achieve this goal, there is provided a recipe creation device comprising an arithmetic processing device that, on the basis of design data for a semiconductor element, establishes measurement conditions or inspection conditions by a semiconductor measurement device or a semiconductor inspection device, wherein the arithmetic processing device is configured to be able to access a database in which the measurement conditions or inspection conditions, and the pattern information of the semiconductor element, are stored in associated form, and the measurement conditions or inspection conditions are selected through a search using pattern information of the semiconductor element.

A component testing plan considers both distinguishable components and undistinguishable components for each of the distinguishable components. In addition to distinguishable and undistinguishable components, inputs to the system include a level of customer demand, using component-based demand forecasting, and what test types are to be performed. The system then determines a set of combinatorial test options for each of the test types and a cycle time for each combinatorial test option. The system then cognitively develops a component testing plan including a listing of combinatorial test(s) of the set of combinatorial test options for each test type to be performed and how many times to perform each combinatorial test(s) on a testing machine with a known capacity in order to minimize a total cycle time for all of the test types and a number of the testing machine needed; and implementing the component testing plan on a set of test components on a production line.

A plant inspection planning optimization apparatus includes: a plant operation estimation unit that estimates the variation of the operation of a plant; a degradation probability distribution estimation unit that estimates the probability distributions of the degradations of plural inspection-scheduled points of the plant with the use of the variation of the operation of the plant and the degradation state and the probability distribution of the parameter of an estimation model obtained at the previous inspection; an inspection point optimization unit that selects inspection points selected from the inspection-scheduled points in accordance with a selection index with the use of the probability distributions of the degradations of the plural inspection-scheduled points; and an output unit that provides the selected inspection points and inspection techniques.