A data processing method for detection of deterioration of semiconductor process kits includes the following steps: acquiring a plurality of Raman spectra data of a semiconductor process kit and performing a plurality calculating processes on the Raman spectra data to obtain a first deterioration state determining parameter indicating the aging degree of the entire semiconductor process kit and a second deterioration state determining parameter indicating the degree of variation of the internal molecular structure of the semiconductor process kit.

An online monitoring system for industrial processes, such as nuclear power processes, including a data acquisition unit configured to sample output signals simultaneously from a plurality of process sensors, and a computing unit configured to record sampled output signals from the data acquisition unit and to cross-correlate the output signals from two or more of the process sensors to diagnose operation of the industrial process, identify loose parts and/or degradation of industrial plant equipment, enable virtual sensing, calculate sensor response time using the noise analysis technique, and to verify sensor calibration using the cross calibration method and/or empirical and/or physical modeling.

A data processing method for detection of deterioration of semiconductor process kits includes the following steps: acquiring a plurality of Raman spectra data of a semiconductor process kit and performing a plurality calculating processes on the Raman spectra data to obtain a first deterioration state determining parameter indicating the aging degree of the entire semiconductor process kit and a second deterioration state determining parameter indicating the degree of variation of the internal molecular structure of the semiconductor process kit.