A method for programming a three-dimensional (3D) workpiece scan path for a metrology system comprising a 3D motion control system, a first type of Z-height sensing system, and a second type of Z-height sensing system that provides less precise surface Z-height measurements over a broader Z-height measuring range. The method comprises: placing a representative workpiece on a stage of the metrology system, defining at least a first workpiece scan path segment for the representative workpiece, determining preliminary actual surface Z-height measurements along the first workpiece scan path segment, and determining a precise 3D scan path for moving the first type of Z-height sensing system to perform precise surface Z-height measurements. The precise 3D scan path is based on the determined preliminary actual surface Z-height measurements. The precise 3D scan path may be used for performing precise surface Z-height measurements or stored to be used in an inspection program.

In one embodiment, a method includes receiving, from a first sensor on a robot, first sensor data indicative of an environment of the robot. The method also includes identifying, based on the first sensor data, an object of an object type in the environment of the robot, where the object type is associated with a classifier that takes sensor data from a predetermined pose relative to the object as input. The method further includes causing the robot to position a second sensor on the robot at the predetermined pose relative to the object. The method additionally includes receiving, from the second sensor, second sensor data indicative of the object while the second sensor is positioned at the predetermined pose relative to the object. The method further includes determining, by inputting the second sensor data into the classifier, a property of the object.

In one embodiment, a method includes receiving, from a first sensor on a robot, first sensor data indicative of an environment of the robot. The method also includes identifying, based on the first sensor data, an object of an object type in the environment of the robot, where the object type is associated with a classifier that takes sensor data from a predetermined pose relative to the object as input. The method further includes causing the robot to position a second sensor on the robot at the predetermined pose relative to the object. The method additionally includes receiving, from the second sensor, second sensor data indicative of the object while the second sensor is positioned at the predetermined pose relative to the object. The method further includes determining, by inputting the second sensor data into the classifier, a property of the object.

In one embodiment, a method includes receiving, from a first sensor on a robot, first sensor data indicative of an environment of the robot. The method also includes identifying, based on the first sensor data, an object of an object type in the environment of the robot, where the object type is associated with a classifier that takes sensor data from a predetermined pose relative to the object as input. The method further includes causing the robot to position a second sensor on the robot at the predetermined pose relative to the object. The method additionally includes receiving, from the second sensor, second sensor data indicative of the object while the second sensor is positioned at the predetermined pose relative to the object. The method further includes determining, by inputting the second sensor data into the classifier, a property of the object.

In one embodiment, a method includes receiving, from a first sensor on a robot, first sensor data indicative of an environment of the robot. The method also includes identifying, based on the first sensor data, an object of an object type in the environment of the robot, where the object type is associated with a classifier that takes sensor data from a predetermined pose relative to the object as input. The method further includes causing the robot to position a second sensor on the robot at the predetermined pose relative to the object. The method additionally includes receiving, from the second sensor, second sensor data indicative of the object while the second sensor is positioned at the predetermined pose relative to the object. The method further includes determining, by inputting the second sensor data into the classifier, a property of the object.