There is provided a method for creating machining data for a hybrid ultraprecision machining device for manufacturing a micro-machined product from a workpiece, the machining device comprising: an electromagnetic-wave-machining means for roughly machining the workpiece; a precision-machining means for precisely machining the roughly machined workpiece; and a shape-measurement means, wherein the creation of the machining data makes use of: information on original shape corresponding to shape of the workpiece; information on roughly-machining shape to be removed from the workpiece by the electromagnetic-wave-machining means; and stereoscopic model of after-electromagnetic-wave-machining shape which is obtained by subtracting the roughly-machining shape from the original shape, wherein the machining data is created for electromagnetic-wave machining on the basis of information on a plurality of sliced portions obtained by partially slice-cutting from the stereoscopic model of the after-electromagnetic-wave-machining shape.