According to one aspect of the technique of the present disclosure, there is provided a method of displaying substrate arrangement data, including: (a) setting each of a transport parameter for determining at least an arrangement of substrates to be loaded into a substrate retainer and carrier information of a carrier storing the substrates to be loaded into the substrate retainer; (b) creating the substrate arrangement data of a case where the substrates are loaded into the substrate retainer based on the transport parameter and the carrier information set in (a); and (c) displaying the substrate arrangement data at least comprising data representing the arrangement of the substrates in a state where the substrates are loaded in the substrate retainer.

A frequency characteristic measurement device that measures the frequency characteristic of a measurement target includes: a multi-sine signal generation unit that generates a multi-sine signal; a sweep sinusoidal wave generation unit that generates a plurality of sweep sinusoidal waves; an input signal switching unit that selects any one of the multi-sine signal and the sweep sinusoidal waves so as to input the selected one to the measurement target; a data acquisition unit that acquires, at a predetermined sampling frequency, sampling data of an input signal which is input to the measurement target and sampling data of an output signal which is output from the measurement target; and a characteristic calculation unit that calculates a frequency characteristic including the gain and the phase of the input and output signals in the measurement target from the sampling data of the input and output acquired.

The determination of a slip constant is simplified upon driving a motor for which the slip constant is unknown, based on the acceleration time when accelerating an induction motor from start up to a predetermined rotation speed. A parameter determination support device for motor driving includes: an automatic measurement part which automatically measures characteristic information including the acceleration time upon driving an induction motor to accelerate from start up to a predetermined rotation speed set in advance, relative to each slip constant, based on a plurality of slip constants set in advance; and an estimation part which estimates, as the slip constant of the induction motor, a slip constant at which the acceleration time up to a predetermined rotation speed becomes the shortest, among a plurality of slip constants, based on the characteristic information.

A numerical control system according to the present invention controls machine drive systems included in a machine tool that performs machining using a tool, according to a numerical control program, and includes a coordinate transformation unit that acquires a disturbance force or a disturbance torque applied to each machine drive system, and coordinate-transforms the disturbance force or the disturbance torque into a tool reference coordinate system for output, and an identification unit that calculates cutting process parameters that determine characteristics of a cutting process model and dynamic characteristic parameters that determine characteristics of a dynamics model of the machine tool, using the disturbance force or the disturbance torque output from the coordinate transformation unit, states of the machine drive systems, predetermined equation models, and cutting conditions. The equation models define relationships between the cutting process parameters, the dynamic characteristic parameters, and the disturbance force or the disturbance torque.

A numerical control system according to the present invention controls machine drive systems included in a machine tool that performs machining using a tool, according to a numerical control program, and includes a coordinate transformation unit that acquires a disturbance force or a disturbance torque applied to each machine drive system, and coordinate-transforms the disturbance force or the disturbance torque into a tool reference coordinate system for output, and an identification unit that calculates cutting process parameters that determine characteristics of a cutting process model and dynamic characteristic parameters that determine characteristics of a dynamics model of the machine tool, using the disturbance force or the disturbance torque output from the coordinate transformation unit, states of the machine drive systems, predetermined equation models, and cutting conditions. The equation models define relationships between the cutting process parameters, the dynamic characteristic parameters, and the disturbance force or the disturbance torque.

The present invention is suitable for easily properly setting control parameters in short time. The simulation device of the present invention comprises: a frequency response function computing part (53) computing a frequency response function according to a first command value and a measured value of a mechanical system; an impulse response computing part (41) computing an impulse response by performing inverse Fourier transform on the frequency response function obtained according to the frequency response function and the control parameters; and a time response outputting part (44) executing time response simulation of the mechanical system (7) according to a second command value and the impulse response.

A method of monitoring movement of a robotic arm, the robotic arm being arranged to be moved by an actuator, the method comprising: determining an expected robotic arm condition based on a known robotic condition and a torque applied to the robotic arm by the actuator; measuring an actual robotic arm condition during movement of the arm caused by the applied torque; and determining whether a collision has occurred by comparing the actual robotic arm condition with the expected robotic arm condition and generating a collision signal if a difference between the actual robotic arm condition and the expected robotic arm condition exceeds a threshold.

A numerical control system according to the present invention controls machine drive systems included in a machine tool that performs machining using a tool, according to a numerical control program, and includes a coordinate transformation unit that acquires a disturbance force or a disturbance torque applied to each machine drive system, and coordinate-transforms the disturbance force or the disturbance torque into a tool reference coordinate system for output, and an identification unit that calculates cutting process parameters that determine characteristics of a cutting process model and dynamic characteristic parameters that determine characteristics of a dynamics model of the machine tool, using the disturbance force or the disturbance torque output from the coordinate transformation unit, states of the machine drive systems, predetermined equation models, and cutting conditions. The equation models define relationships between the cutting process parameters, the dynamic characteristic parameters, and the disturbance force or the disturbance torque.

The determination of a slip constant is simplified upon driving a motor for which the slip constant is unknown, based on variation of acceleration when accelerating an induction motor from start up to a predetermined speed. A parameter determination support device for motor driving includes: an automatic measurement part which automatically measures characteristic information including a speed during acceleration and acceleration upon driving an induction motor to accelerate from start up to a predetermined speed set in advance which is no more than a base speed of the induction motor, relative to each slip constant, based on a plurality of slip constants set in advance; and an estimation part which estimates, as a slip constant of the induction motor, a slip constant having the smallest variation in acceleration, among a plurality of slip constants, based on the characteristic information.

The present invention is suitable for easily properly setting control parameters in short time. The simulation device of the present invention comprises: a frequency response function computing part (53) computing a frequency response function according to a first command value and a measured value of a mechanical system; an impulse response computing part (41) computing an impulse response by performing inverse Fourier transform on the frequency response function obtained according to the frequency response function and the control parameters; and a time response outputting part (44) executing time response simulation of the mechanical system (7) according to a second command value and the impulse response.