A robot system is provided, comprising: a robot including a first sensor configured to measure a displacement quantity of a coordinate position between a work point and a target point defined for each of a plurality of objects with different shapes or a physical quantity that changes due to the displacement quantity at a first operation frequency; and a control apparatus for controlling the robot, including a coarse operation management unit configured to move the target point to the vicinity of the object at a second operation frequency, a calculation control unit configured to generate a control signal to correct the displacement quantity at a third operation frequency in such a manner that the target point approaches the work point, and a correction drive unit configured to execute a correction operation to align the target point with the work point based on the control signal; wherein the second operation frequency is a frequency less than or equal to ½ of the first and third operation frequencies.

A robot calibration system includes a calibration fixture configured to be mounted on a substrate processing chamber. The calibration fixture includes at least one camera arranged to capture an image including an outer edge of a test substrate and an edge ring surrounding the test substrate. A controller is configured to receive the captured image, analyze the captured image to measure a distance between the outer edge of the test substrate and the edge ring, calculate a center of the test substrate based on the measured distance, and calibrate a robot configured to transfer substrate to and from the substrate processing chamber based on the calculated center of the test substrate.

A position correction system includes: one or more conveyer devices; an imaging device fixed to differential installation positions of the one or more conveyer devices and configured to image the robot to generate a plurality of captured images in a state in which the conveyer device has stopped at a predetermined stop position in a predetermined range from the robot; a position calculating device configured to calculate position coordinates of an actual reference point of the robot using the generated captured image; a correction value calculating device configured to calculate a correction value based on a difference between the calculated position coordinates of the actual reference point of the robot and position coordinates of a target reference point of the robot which is determined by simulation; and a position correcting device configured to correct the position of the actual reference point of the robot based on the calculated correction value.

A method for visually controlling a robot arm which is displaceable in a plurality of degrees of freedom, the robot arm carrying at least one displaceable reference point, includes the steps of: a) placing at least one camera so that a target point where the reference point is to be placed is contained in an image output by the at least one camera; b) displacing the robot arm so that the reference point is within the image; c) determining a vector which, in the image, connects the reference point to the target point; d) choosing one of the plurality of degrees of freedom, moving the robot arm by a predetermined standard distance in the one degree of freedom, and recording a standard displacement of the reference point within the image resulting from the movement of the robot arm; e) repeating step d) at least until the vector can be decomposed.

Disclosed are a robot system for assembling components and a control method thereof. The control method compares location coordinates of a robot in a vision coordinate system with location coordinates in a robot coordinate system and calculates a first correction value, calculates a second correction value from a difference between location coordinates of a correction tool and a component, and calculates a third correction value from location coordinates of components located at predetermined spaced locations and spacing coordinates, thereby precisely assembling components and performing inspection of the assembling.

A precision detection method for detecting the precision of a surgical robot positioning system includes: acquiring spatial position coordinates of a first detection point and a second detection point; acquiring information of a spatial axis for a surgical robot reaching a planned path, wherein the planned path is formed based on the first detection point and the second detection point; and calculating a first distance from the first detection point to a spatial axis and a second distance from the second detection point to the spatial axis. The precision detection method for a surgical robot positioning system can accurately detect the precision of the surgical robot positioning system.

An end tool metrology position coordinates determination system is provided for use with a robot. A first accuracy level defined as a robot accuracy (e.g., for controlling and sensing an end tool position of an end tool that is mounted proximate to a distal end of a movable arm configuration of the robot) is based on using position sensors (e.g., encoders) included in the robot. The system includes the end tool, an imaging configuration, XY scale, image triggering portion and processing portion. One of the XY scale or imaging configuration is coupled to the end tool and the other is coupled to a stationary element (e.g., a frame located above the robot). The imaging configuration acquires an image of the XY scale, which is utilized to determine a relative position that is indicative of the end tool position, with an accuracy level that is better than the robot accuracy.

An injection molding machine which includes a mold clamping device (20) that opens and closes a mold (90) and clamps the closed mold, an injection device (30) that injects a material into the clamped mold, and an ejecting device (21) that ejects a molded product (100) molded in the mold is provided. The injection molding machine further includes a plurality of cameras (2) that photograph the injection molding machine to generate image data, a memory (6) that records the image data, an input device that sets at least one photographing time by selecting the start or end of each process in a molding cycle, and a control device that controls the camera to photograph the injection molding machine at the at least one photographing time, and controls the memory to record the image data.

A method for visually controlling a robot arm which is displaceable in a plurality of degrees of freedom, the robot arm carrying at least one displaceable reference point, includes the steps of: a) placing at least one camera so that a target point where the reference point is to be placed is contained in an image output by the at least one camera; b) displacing the robot arm so that the reference point is within the image; c) determining a vector which, in the image, connects the reference point to the target point; d) choosing one of the plurality of degrees of freedom, moving the robot arm by a predetermined standard distance in the one degree of freedom, and recording a standard displacement of the reference point within the image resulting from the movement of the robot arm; e) repeating step d) at least until the vector can be decomposed.

A precision detection method for detecting the precision of a surgical robot positioning system includes: acquiring spatial position coordinates of a first detection point and a second detection point; acquiring information of a spatial axis for a surgical robot reaching a planned path, wherein the planned path is formed based on the first detection point and the second detection point; and calculating a first distance from the first detection point to a spatial axis and a second distance from the second detection point to the spatial axis. The precision detection method for a surgical robot positioning system can accurately detect the precision of the surgical robot positioning system.