Embodiments described herein generally relate to an apparatus and method of performing a robot calibration process within a substrate processing system. In one embodiment, a calibration device is used to calibrate a robot having an end effector. The calibration device includes a body, a first side and a second side opposite to the first side. The calibration device further includes a sensor disposed on the second side of the body. In some embodiments, the sensor covers the entire second side of the body. In this configuration, because the sensor covers the entire second side of the body of the calibration device, the calibration device can be utilized to sense the contact between the sensor and various differently configured chamber components found in different types of processing chambers or stations disposed within a processing system during a calibration process performed in each of the different processing chambers or stations.

Methods and devices for diagnosing a robot. A method includes obtaining a spectrum of a motion signal generated by a rotating component of the robot during operation of the robot. A frequency amplitude of a sub-component of the rotating component is determined from the spectrum, based on a physical characteristic and a speed of the sub-component. A failure of the sub-component is detected by comparing the frequency amplitude with a threshold amplitude.

Provided is a robot calibration method for calibrating a position of an arm tip of a robot, the method including measuring a relative positional relationship between a first link and a second link on opposite ends of at least three links which are connected to each other so as to execute collective calibration for at least two joint axes between the at least three links, measuring a relative positional relationship between a base and a link connected to the base to execute independent calibration for a joint axis between the base and the link, or measuring a relative positional relationship between the first link and another link as to execute independent calibration for a joint axis between the first link and the other link, and calibrating the position of the arm tip based on the collective and the independent calibrations.

An apparatus for parameter transformation between a robotic device and a controller for the robotic device is presented. The apparatus is configured to receive at least one non-transformed parameter indicative of at least one of a position and a velocity of or for the robotic device, wherein the non-transformed parameter is received from the robotic device or the controller, respectively. The apparatus is further configured to transform the received non-transformed parameter to a transformed parameter using a transformation between an ideal parameter domain of the controller and a real parameter domain of the robotic device, the ideal parameter domain including ideal parameters processable by the controller and the real parameter domain including real parameters measurable at the robotic device and capable of deviating from the associated ideal parameters. The apparatus is further configured to transmit the transformed parameter to the other one of the robotic device and the controller, A method, a system, a computer-program product and a cloud computing system for parameter transformation are presented also.

Methods and devices for diagnosing a robot. A method includes obtaining a spectrum of a motion signal generated by a rotating component of the robot during operation of the robot. A frequency amplitude of a sub-component of the rotating component is determined from the spectrum, based on a physical characteristic and a speed of the sub-component. A failure of the sub-component is detected by comparing the frequency amplitude with a threshold amplitude.

A robot control device includes a position-accuracy-information storage unit that stores position accuracy information at a plurality of division points defined when an operating area space of the multi joint robot is divided into a plurality of areas in a grid shape, a position-accuracy calculation unit that calculates position accuracy at the end-effector position based on the position accuracy information and the current end-effector position of the multi-joint robot, and a position-accuracy output unit that outputs the calculated position accuracy to an outside.

Provided is a robot calibration method for calibrating a position of an arm tip of a robot, the method including measuring a relative positional relationship between a first link and a second link on opposite ends of at least three links which are connected to each other so as to execute collective calibration for at least two joint axes between the at least three links, measuring a relative positional relationship between a base and a link connected to the base to execute independent calibration for a joint axis between the base and the link, or measuring a relative positional relationship between the first link and another link as to execute independent calibration for a joint axis between the first link and the other link, and calibrating the position of the arm tip based on the collective and the independent calibrations.

Embodiments described herein generally relate to an apparatus and method of performing a robot calibration process within a substrate processing system. In one embodiment, a calibration device is used to calibrate a robot having an end effector. The calibration device includes a body, a first side and a second side opposite to the first side. The calibration device further includes a sensor disposed on the second side of the body. In some embodiments, the sensor covers the entire second side of the body. In this configuration, because the sensor covers the entire second side of the body of the calibration device, the calibration device can be utilized to sense the contact between the sensor and various differently configured chamber components found in different types of processing chambers or stations disposed within a processing system during a calibration process performed in each of the different processing chambers or stations.

A robot includes an arm. A first inclinometer is provided in a grasping unit provided in the arm or an object grasped by the grasping unit. The arm is operated based on a first angle of a reference surface and a second angle measured by the first inclinometer.

A robot control device includes a position-accuracy-information storage unit that stores position accuracy information at a plurality of division points defined when an operating area space of the multi joint robot is divided into a plurality of areas in a grid shape, a position-accuracy calculation unit that calculates position accuracy at the end-effector position based on the position accuracy information and the current end-effector position of the multi-joint robot, and a position-accuracy output unit that outputs the calculated position accuracy to an outside.