Patent classifications
G05B2219/39278
Feedback control device that suppresses disturbance vibration using machine learning, article manufacturing method, and feedback control method
The feedback control device takes information regarding a control deviation between a measured value and a target value of a controlled object as input, and outputs a control amount for the controlled object; comprising: a first control unit that takes information regarding the control deviation as input, and outputs a first control amount for the controlled object; a second control unit that takes information regarding the control deviation as input and outputs a second control amount for the controlled object, and in which a parameter for calculating the second control amount is determined by machine learning; an operation unit that operates the controlled object using the first control amount output from the first control unit and the second control amount output from the second control unit; and a sampling unit for thinning out at a predetermined period information regarding the control deviation input to the second control unit.
FEEDBACK CONTROL DEVICE, ARTICLE MANUFACTURING METHOD, AND FEEDBACK CONTROL METHOD
The feedback control device takes information regarding a control deviation between a measured value and a target value of a controlled object as input, and outputs a control amount for the controlled object; comprising:
a first control unit that takes information regarding the control deviation as input, and outputs a first control amount for the controlled object; a second control unit that takes information regarding the control deviation as input and outputs a second control amount for the controlled object, and in which a parameter for calculating the second control amount is determined by machine learning;
an operation unit that operates the controlled object using the first control amount output from the first control unit and the second control amount output from the second control unit; and a sampling unit for thinning out at a predetermined period information regarding the control deviation input to the second control unit.