A method for controlling a controlled system by a control device, the method may include transmitting multiple actuation signals to multiple degree of freedom (DOF) points of the controlled system; wherein the multiple actuation signals comprise multiple alternating current (AC) components that are mutually orthogonal, measuring at least one feedback signal from at least one probe point of the controlled system; wherein a number of DOF points exceeds a number of the at least one probe point; determining, based upon the at least one feedback signal, values of line search pulses to be sent to the multiple DOF points during at least one line search iteration; and performing the at least one line search iteration.

A positioning control device controlling multiple moving bodies including a disturbance non-interference-enabling compensator performing non-interference-enabling compensation of a disturbance of an feedback compensator and an operation amount of the moving body on the side affected by the disturbance is provided. The disturbance non-interference-enabling compensator includes a second differentiator to perform second-order differentiation of a position command value of a moving body on a disturbance generating side to output an acceleration command value; a first multiplier to multiply an acceleration command value output from the second differentiator by a first gain to output a correction amount of an feedback compensator of the moving body on the side affected by the disturbance; and a second multiplier to multiply an acceleration command value output from the second differentiator by a second gain to output a correction amount for an operation amount of the moving body on the side affected by the disturbance.

A method for controlling a controlled system by a control device, the method may include transmitting multiple actuation signals to multiple degree of freedom (DOF) points of the controlled system; wherein the multiple actuation signals comprise multiple alternating current (AC) components that are mutually orthogonal, measuring at least one feedback signal from at least one probe point of the controlled system; wherein a number of DOF points exceeds a number of the at least one probe point; determining, based upon the at least one feedback signal, values of line search pulses to be sent to the multiple DOF points during at least one line search iteration; and performing the at least one line search iteration.

A positioning control device controlling multiple moving bodies including a disturbance non-interference-enabling compensator performing non-interference-enabling compensation of a disturbance of an feedback compensator and an operation amount of the moving body on the side affected by the disturbance is provided. The disturbance non-interference-enabling compensator includes a second differentiator to perform second-order differentiation of a position command value of a moving body on a disturbance generating side to output an acceleration command value; a first multiplier to multiply an acceleration command value output from the second differentiator by a first gain to output a correction amount of an feedback compensator of the moving body on the side affected by the disturbance; and a second multiplier to multiply an acceleration command value output from the second differentiator by a second gain to output a correction amount for an operation amount of the moving body on the side affected by the disturbance.

A method for controlling a controlled system by a control device, the method may include transmitting multiple actuation signals to multiple degree of freedom (DOF) points of the controlled system; wherein the multiple actuation signals comprise multiple alternating current (AC) components that are mutually orthogonal; measuring at least one feedback signal from at least one probe point of the controlled system; wherein a number of DOF points exceeds a number of the at least one probe point; determining, based upon the at least one feedback signal, values of line search pulses to be sent to the multiple DOF points during at least one line search iteration; and performing the at least one line search iteration.

A method for controlling a controlled system by a control device, the method may include transmitting multiple actuation signals to multiple degree of freedom (DOF) points of the controlled system; wherein the multiple actuation signals comprise multiple alternating current (AC) components that are mutually orthogonal; measuring at least one feedback signal from at least one probe point of the controlled system; wherein a number of DOF points exceeds a number of the at least one probe point; determining, based upon the at least one feedback signal, values of line search pulses to be sent to the multiple DOF points during at least one line search iteration; and performing the at least one line search iteration