[Solving Means] A production processing apparatus according to the present technology includes a first robot arm and a plurality of first tilt tables. The first robot arm is capable of conveying a work. On each of the plurality of first tilt tables, the work conveyed by the first robot arm can be mounted. The plurality of first tilt tables are tilted a predetermined angle from a horizontal surface at positions on a circumference of a circle with the first robot arm being a center, and the work is subjected to production processing in a state where the work is mounted on one of the plurality of first tilt tables.

A production processing apparatus according to the present technology includes a first robot arm and a plurality of first tilt tables. The first robot arm is capable of conveying a work. On each of the plurality of first tilt tables, the work conveyed by the first robot arm can be mounted. The plurality of first tilt tables are tilted a predetermined angle from a horizontal surface at positions on a circumference of a circle with the first robot arm being a center, and the work is subjected to production processing in a state where the work is mounted on one of the plurality of first tilt tables.

It is very difficult to schedule a single-arm cluster tool with wafer revisiting such that wafer residency time constraints are satisfied. The present invention conducts a study on this challenging problem for a single-arm cluster tool with atomic layer deposition (ALD) process. With a so called p-backward strategy being applied, a Petri net model is developed to describe the dynamic behavior of the system. Based on the model, existence of a feasible schedule is analyzed, schedulability conditions are derived, and scheduling algorithms are presented if there is a schedule. A schedule is obtained by simply setting the robot waiting time if schedulable and it is very computationally efficient. The obtained schedule is shown to be optimal. Illustrative examples are given to demonstrate the proposed approach.