A method of the present disclosure includes (a) setting a limit value specifying a constraint condition with respect to a specific force control characteristic value detected in force control and an objective function with respect to a specific evaluation item relating to the work, (b) searching for an optimal value of the force control parameter using the objective function, and (c) determining a setting value of the force control parameter according to a result of the searching. The objective function has a form in which a penalty increasing according to an exceedance of the force control characteristic value from an allowable value smaller than the limit value is added to an actual measurement value of the evaluation item.

A nut runner, an attachment unit, and a sliding member are provided in a second arm that is a leading arm of the robot and has a leading end shaft movable along the direction of an elevation axis. The nut runner includes a screw fastening driver, a drive shaft rotationally driven by the screw fastening driver, and an extension bar that is so connected to rotate together with the drive shaft in the circumferential direction and to move in the axial direction. The attachment unit fixedly connects the screw fastening driver to the second arm so that a screw fastening axis parallel to the elevation axis serves as a rotation axis of the screw fastening driver. The sliding member is connected to the leading end shaft and supports the extension bar so as to move together in the axial direction and are rotatable relatively in the circumferential direction.

Provided is a method for controlling a robot including a base, a robot arm coupled to the base, and a drive unit including a motor for driving the robot arm. The method includes a first step of acquiring weight information including information on a weight of an end effector installed on the robot arm and a weight of an object to be worked by the end effector, a second step of determining a frequency component to be removed from a drive signal for driving the motor based on the weight information acquired in the first step, and a third step of removing the frequency component determined in the second step from the drive signal to generate a correction drive signal.

A substrate processing apparatus comprising a transport arm having serially connected arm links, at least one of the arm links having a predetermined arm link height, at least a first pulley and a second pulley, where the second pulley is fixed to an arm link of the serially connected arm links, and at least one torque transmission band extending longitudinally between and coupled to each of the first pulley and the second pulley, the at least one torque transmission band having a corresponding band height for the predetermined arm link height and a variable lateral thickness such that the at least one torque transmission band includes a segment of laterally increased cross section for the corresponding band height.

A drive system (1) which is designed in particular as a robot (1a) and which has a fluid-operated linear drive (2), on the drive unit (7) of which linear drive, which drive unit can be driven so as to perform a drive movement (8), there is mounted an electrically and fluidically operable working unit (3). The linear drive (2) is equipped with a control valve device (16) which can be actuated by means of an internal electronic control device (32) in order to move the drive unit (7). Two drive pressure sensor devices (113) and a travel measuring device (114) are connected to the internal electronic control device (32), such that a position-controlled operation of the drive unit (8) is possible. The drive system (1) furthermore includes a flexible electrical cable arrangement (97) and a flexible fluid hose arrangement (95), which are fixed to the drive unit (7) and which serve for the supply of electricity and fluid to the working unit (3).

A control device controlling a robot including a robot arm, a drive section causing the robot arm to pivot around a pivot axis, a shaft that is provided at a position of the robot arm different from the pivot axis and that moves parallel to the pivot axis, and an angular velocity sensor that is provided in the robot arm and that detects angular velocity around an axis orthogonal to an axial direction of the pivot axis and parallel to a plane including the pivot axis and an axis of the shaft, the control device includes a processor that is configured to control the robot, wherein the processor is configured to perform feedback control on the drive section based on the angular velocity.

A SCARA robot includes a first arm configured to be moved in a direction different from a gravity direction; a first motor configured to drive the first arm; a first speed reducer, an input shaft of which is connected to the first motor and an output shaft of which is connected to the first arm; and a first output-side angle sensor configured to detect an operating position on an output side of the first speed reducer, wherein the first motor is controlled on the basis of an output of the first output-side angle sensor.

A control device controlling a robot including a robot arm, a drive section causing the robot arm to pivot around a pivot axis, a shaft that is provided at a position of the robot arm different from the pivot axis and that moves parallel to the pivot axis, and an angular velocity sensor that is provided in the robot arm and that detects angular velocity around an axis orthogonal to an axial direction of the pivot axis and parallel to a plane including the pivot axis and an axis of the shaft, the control device includes a processor that is configured to control the robot, wherein the processor is configured to perform feedback control on the drive section based on the angular velocity.

A SCARA robot includes a first arm configured to be moved in a direction different from a gravity direction; a first motor configured to drive the first arm; a first speed reducer, an input shaft of which is connected to the first motor and an output shaft of which is connected to the first arm; and a first output-side angle sensor configured to detect an operating position on an output side of the first speed reducer, wherein the first motor is controlled on the basis of an output of the first output-side angle sensor.

A dual-arm robot system includes a controller configured or programmed to determine whether or not interference determination targets interfere with each other based on whether or not three-dimensional models generated with a plurality of portions including at least a hand among the hand, a horizontal link, and a body as the interference determination targets overlap each other.