The invention provides a robot system that enables easy, efficient, and precise checking through simulation. The invention includes a virtual model display unit configured to place virtual models in a virtual space on a screen and display the virtual models simultaneously with real equipment; a robot program teaching unit configured to perform teaching of a robot program in the virtual space; a real space virtual model display unit configured to display the virtual models and teaching points of the robot program in a real space, based on a positional relationship in the virtual space; and a virtual model placement position correcting unit configured to correct placement positions of the virtual models to match the real equipment in the real space.

A robot system includes a robot including leading end, base, and multi-articular arm, and circuitry that controls the atm to move the end based on motion control program specifying transition over time of target position and posture of the end, the transition including correction target portion starting and ending in the transition; controls the arm to move the end in response to guided manipulation applying external force to the robot while the circuitry controls the arm; obtains relative command information based on the target position and posture at start of the correction portion and specifying the target position and posture at points in the correction portion including start and end in the correction portion; and controls the arm to move the end from the position and posture based on the information, beginning at time when movement of the arm controlled by the circuitry in response to the manipulation has ended.

The invention provides a robot system that enables easy, efficient, and precise checking through simulation The invention includes a virtual model display unit configured to place virtual models in a virtual space on a screen and display the virtual models simultaneously with real equipment; a robot program teaching unit configured to perform teaching of a robot program in the virtual space; a real space virtual model display unit configured to display the virtual models and teaching points of the robot program in a real space, based on a positional relationship in the virtual space; and a virtual model placement position correcting unit configured to correct placement positions of the virtual models to match the real equipment in the real space.

An offline teaching device includes: a storage unit that stores a program; a display control unit that causes a monitor to display four or more coordinate points P1 to P6 based on teaching point data described in the program and one line connecting the four or more coordinate points P1 to P6 successively; and a correction amount generation unit that, after two coordinate points P2 and P5 are selected on the monitor from remaining coordinate points P2 to P5 except the coordinate points P1 and P6 serving as a starting point and an ending point of the line and one coordinate system is selected among a plurality of coordinate systems, generates correction amounts of the coordinate points P2 to P5 without changing the teaching point data on the basis of dragging of a segment between the selected two coordinate points P2 and P5 according to the selected coordinate system.

A robot controller having a function that simplifies learning and a robot control method. The robot controller includes: a learning section configured to carry out learning of detecting a deviation between a commanded trajectory representing a position of the robot generated according to the command values and an operation trajectory representing an actual position where the robot has moved, and generate a corrected program by adjusting the commanded trajectory; a saving section configured to save the corrected program; and a relearning section configured to carry out relearning on a relearning location, the relearning location being a part of the operation trajectory designated by an operator.

A robot system includes a robot including leading end, base, and multi-articular arm, and circuitry that controls the atm to move the end based on motion control program specifying transition over time of target position and posture of the end, the transition including correction target portion starting and ending in the transition; controls the arm to move the end in response to guided manipulation applying external force to the robot while the circuitry controls the arm; obtains relative command information based on the target position and posture at start of the correction portion and specifying the target position and posture at points in the correction portion including start and end in the correction portion; and controls the arm to move the end from the position and posture based on the information, beginning at time when movement of the arm controlled by the circuitry in response to the manipulation has ended.

A robot control method includes a teaching step, first processing step, modifying step, second processing step, and third processing step. In the modifying step, a third teaching point is changed to a second modified point, a fourth teaching point to a third modified point, and a fifth teaching point to a fourth modified point, based on a difference between a second teaching point and a first modified point. A profile modifying control to change the position of a work tool is applied, using a sensor mounted on the processing advancing direction side of the work tool, in the first processing step and the third processing step. An attitude of the work tool is changed during the second processing step.

An offline teaching device includes: a storage unit that stores a program; a display control unit that causes a monitor to display four or more coordinate points P1 to P6 based on teaching point data described in the program and one line connecting the four or more coordinate points P1 to P6 successively; and a correction amount generation unit that, after two coordinate points P2 and P5 are selected on the monitor from remaining coordinate points P2 to P5 except the coordinate points P1 and P6 serving as a starting point and an ending point of the line and one coordinate system is selected among a plurality of coordinate systems, generates correction amounts of the coordinate points P2 to P5 without changing the teaching point data on the basis of dragging of a segment between the selected two coordinate points P2 and P5 according to the selected coordinate system.

A robot teaching position correcting method and system is provided. The robot is driven to move along wafer pick-and-place operation paths defined by a sequence of waypoints. Distances between the waypoint and a wafer supporter of the wafer carrier above the waypoint are detected by upper sensors provided on a top surface of the robot when the robot is positioned at the waypoint. Then, the position parameter of the waypoint is corrected accordingly, so as to ensure safe wafer handling.

A robot controller having a function that simplifies learning and a robot control method. The robot controller includes: a learning section configured to carry out learning of detecting a deviation between a commanded trajectory representing a position of the robot generated according to the command values and an operation trajectory representing an actual position where the robot has moved, and generate a corrected program by adjusting the commanded trajectory; a saving section configured to save the corrected program; and a relearning section configured to carry out relearning on a relearning location, the relearning location being a part of the operation trajectory designated by an operator.