A system and method that automatically resolves conflicts among sensor information in a sensor fusion robot system. Such methods can accommodate converging ambiguous and divergent sensor information in a manner that can allow continued, and relatively accurate, robotic operations. The processes can include handling sensor conflict via sensor prioritization, including, but not limited, prioritization based on the particular stage or segment of the assembly operation when the conflict occurs, overriding sensor data that exceeds a threshold value, and/or prioritization based on evaluations of recent sensor performance, predictions, system configuration, and/or historical information. The processes can include responding to sensor conflicts through comparisons of the accuracy of workpiece location predictions from different sensors during different assembly stages in connection with arriving at a determination of which sensor(s) is providing accurate and reliable predictions.

A system and method that automatically resolves conflicts among sensor information in a sensor fusion robot system. Such methods can accommodate converging ambiguous and divergent sensor information in a manner that can allow continued, and relatively accurate, robotic operations. The processes can include handling sensor conflict via sensor prioritization, including, but not limited, prioritization based on the particular stage or segment of the assembly operation when the conflict occurs, overriding sensor data that exceeds a threshold value, and/or prioritization based on evaluations of recent sensor performance, predictions, system configuration, and/or historical information. The processes can include responding to sensor conflicts through comparisons of the accuracy of workpiece location predictions from different sensors during different assembly stages in connection with arriving at a determination of which sensor(s) is providing accurate and reliable predictions.

Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.

A robot control device includes a first sensor which is used in a first range including the entirety of the operating range of the robot, a second sensor which is used in a second range including at least a part of the operating range of the robot, and a range storing unit for storing a third range included in both the operating range and the second range. The robot control device also includes a ratio setting unit for setting a ratio between a first control input obtained using the first sensor and a second control input obtained using the second sensor with respect to control inputs to the motor based on the comparison of the third range and the position and posture of the robot, and an addition unit for adding the first control input and the second control input together in accordance with the set ratio.

A robot control device includes a first sensor which is used in a first range including the entirety of the operating range of the robot, a second sensor which is used in a second range including at least a part of the operating range of the robot, and a range storing unit for storing a third range included in both the operating range and the second range. The robot control device also includes a ratio setting unit for setting a ratio between a first control input obtained using the first sensor and a second control input obtained using the second sensor with respect to control inputs to the motor based on the comparison of the third range and the position and posture of the robot, and an addition unit for adding the first control input and the second control input together in accordance with the set ratio.