G05B2219/41134

Feedback control device that suppresses disturbance vibration using machine learning, article manufacturing method, and feedback control method
11815861 · 2023-11-14 · ·

The feedback control device takes information regarding a control deviation between a measured value and a target value of a controlled object as input, and outputs a control amount for the controlled object; comprising: a first control unit that takes information regarding the control deviation as input, and outputs a first control amount for the controlled object; a second control unit that takes information regarding the control deviation as input and outputs a second control amount for the controlled object, and in which a parameter for calculating the second control amount is determined by machine learning; an operation unit that operates the controlled object using the first control amount output from the first control unit and the second control amount output from the second control unit; and a sampling unit for thinning out at a predetermined period information regarding the control deviation input to the second control unit.

FEEDBACK CONTROL DEVICE, ARTICLE MANUFACTURING METHOD, AND FEEDBACK CONTROL METHOD
20220107610 · 2022-04-07 ·

The feedback control device takes information regarding a control deviation between a measured value and a target value of a controlled object as input, and outputs a control amount for the controlled object; comprising:

a first control unit that takes information regarding the control deviation as input, and outputs a first control amount for the controlled object; a second control unit that takes information regarding the control deviation as input and outputs a second control amount for the controlled object, and in which a parameter for calculating the second control amount is determined by machine learning;

an operation unit that operates the controlled object using the first control amount output from the first control unit and the second control amount output from the second control unit; and a sampling unit for thinning out at a predetermined period information regarding the control deviation input to the second control unit.

FEEDBACK CONTROL DEVICE THAT SUPPRESSES DISTURBANCE VIBRATION USING MACHINE LEARNING, ARTICLE MANUFACTURING METHOD, AND FEEDBACK CONTROL METHOD
20240036531 · 2024-02-01 ·

The feedback control device takes information regarding a control deviation between a measured value and a target value of a controlled object as input, and outputs a control amount for the controlled object; comprising: a first control unit that takes information regarding the control deviation as input, and outputs a first control amount for the controlled object; a second control unit that takes information regarding the control deviation as input and outputs a second control amount for the controlled object, and in which a parameter for calculating the second control amount is determined by machine learning; an operation unit that operates the controlled object using the first control amount output from the first control unit and the second control amount output from the second control unit; and a sampling unit for thinning out at a predetermined period information regarding the control deviation input to the second control unit.