A method for backlash compensation in motion control systems includes homing a payload of a motion control system, and performing a tooth-pitch non-uniformity procedure on the motion control system to identify a non-uniformity correction. A backlash lookup table is generated for use in backlash correction during normal operation of the motion control system. The backlash lookup table is generated using a training process that includes selecting a move sequence for operating the motion control system, and executing the move sequence with the non-uniformity correction. The training process further includes computing a backlash measurement describing backlash of one or more components of the motion control system during the move sequence, and storing the backlash measurement in the backlash lookup table.

A motor control apparatus includes an error calculation unit which calculates an error between a position of a movable unit and a position of a driven unit, a memory unit which memorizes the error in association with a torque command value as an initial error, and a compensation amountcompensation amount calculation unit which calculates a compensation amountcompensation amount for compensating an elastic deformation amount of an elastic factor between the movable unit and the driven unit. The compensation amountcompensation amount calculation unit calculates the compensation amountcompensation amount based on the initial error held by the memory unit, the torque command value held in association with the initial error, and a torque command value calculated by a torque command calculation unit when a motor rotates reversely.

A method for backlash compensation in motion control systems includes homing a payload of a motion control system, and performing a tooth-pitch non-uniformity procedure on the motion control system to identify a non-uniformity correction. A backlash lookup table is generated for use in backlash correction during normal operation of the motion control system. The backlash lookup table is generated using a training process that includes selecting a move sequence for operating the motion control system, and executing the move sequence with the non-uniformity correction. The training process further includes computing a backlash measurement describing backlash of one or more components of the motion control system during the move sequence, and storing the backlash measurement in the backlash lookup table.