The present disclosure relates to the technical field of mechanical precision manufacturing, in particular to a motor tracking error reduction method and an implementation device based on a micro-drive unit. A motor tracking error reduction method based on micro-drive unit includes: providing a motor mover as the working output end, and feeding back the position information of the motor mover to the micro-drive controller in real time by the sensor; controlling the micro-drive unit to compensate the displacement of the motor mover by the micro-drive controller; correcting the tracking error of the motor mover after the displacement compensation, and feeding back the tracking error information after correction to the motor controller. The error reduction method and implementation device in the present disclosure reduce the motor tracking error and solve the problem of coupling interference. In addition, the single position feedback is used to reduce the production cost.

The present disclosure relates to the technical field of mechanical precision manufacturing, in particular to a motor tracking error reduction method and an implementation device based on a micro-drive unit. A motor tracking error reduction method based on micro-drive unit includes: providing a motor mover as the working output end, and feeding back the position information of the motor mover to the micro-drive controller in real time by the sensor; controlling the micro-drive unit to compensate the displacement of the motor mover by the micro-drive controller; correcting the tracking error of the motor mover after the displacement compensation, and feeding back the tracking error information after correction to the motor controller. The error reduction method and implementation device in the present disclosure reduce the motor tracking error and solve the problem of coupling interference. In addition, the single position feedback is used to reduce the production cost.

A microscopic geometry cutting device includes: a controller that outputs a timer count start command in starting a driving program which controls a drive of an X-axis or a Y-axis moving mechanism; an arrival time calculator that calculates an arrival time from when the timer count start command is output till when the cutter arrives at a machining start position in accordance with relative moving speed information of the moving mechanisms and machining start position information of a workpiece W; an elapsed time determiner that determines whether an elapsed time from when the timer count start command is output is coincident with the arrival time and outputs a trigger signal when the elapsed time is coincident with the arrival time; and a reciprocating stage driver that drives the reciprocating stage in a manner that the cutter advances and retracts in a predetermined cutting depth in response to the trigger signal.

A method comprises applying a driver voltage to an electrostatic comb drive of an MEMS apparatus and overlaying the driver voltage with a periodic voltage signal. The method further comprises determining a torsion angle of a mirror body of the MEMS apparatus based on the periodic voltage signal.

Embodiments are related to providing systematic delayering of chips, such as finFET chips, along with performing field failure and material investigation. Techniques include receiving information from a gyroscope unit, a vacuum stage being connected to a sample, the vacuum stage being configured to maintain a position of the sample to a polishing table. Techniques include adjusting the position of the sample based, at least in part, on the information received from the gyroscope unit.