According to one embodiment of the present disclosure, there is provided a transfer apparatus comprising at least one arm configured to support a substrate; at least one gear disposed at a joint that rotatably supports the at least one arm, the at least one gear rotating the at least one arm; and a detector disposed to face the at least one gear and configured to detect a temperature of the at least one gear without contacting the at least one gear.

According to a machining principle of the CNC gear hobbing machine, a functional relation between a geometric error of a gear and a tracking error of each motion axis of the machine tool is constructed; a machining error mathematical model of tooth profile deviation, tooth pitch deviation and tooth direction deviation at each position control time point is established by tracking errors of each motion axis; a compensation quantity required for a workpiece rotation axis at the next position control time point is calculated by establishing a decoupling compensation model; average absolute values of machining errors and a total compensation quantity of the machining errors under the conditions of not adopting the synchronous control method and adopting the synchronous control method in the total position control time are obtained by calculating machining error values of each position controls time point, and the synchronized multi-axis motion control is completed.

According to a machining principle of the CNC gear hobbing machine, a functional relation between a geometric error of a gear and a tracking error of each motion axis of the machine tool is constructed; a machining error mathematical model of tooth profile deviation, tooth pitch deviation and tooth direction deviation at each position control time point is established by tracking errors of each motion axis; a compensation quantity required for a workpiece rotation axis at the next position control time point is calculated by establishing a decoupling compensation model; average absolute values of machining errors and a total compensation quantity of the machining errors under the conditions of not adopting the synchronous control method and adopting the synchronous control method in the total position control time are obtained by calculating machining error values of each position controls time point, and the synchronized multi-axis motion control is completed.

A robot comprising: a base; an articulated arm extending distally of the base and including two arm members coupled by a joint; a motor; a gearbox having an input shaft coupled to an output of the motor and an output shaft configured to drive relative motion of the arm members about the joint; a position sensor configured to sense relative position of the arm members about the joint; and a control system coupled to the arm configured to drive the motor, the control system being arranged to perform a calibration operation to estimate torque loss in the gearbox by the steps of (i) estimating the inertia of the portion of the arm distal of the joint for motion about the joint; (ii) applying a determined drive power to the motor; (iii) receiving from the position sensor position data indicating the motion of the arm in response to the applied drive power; and (iv) estimating the torque loss in the gearbox in dependence on the estimated inertia, the determined drive power and the position data.

According to one embodiment of the present disclosure, there is provided a transfer apparatus comprising at least one arm configured to support a substrate; at least one gear disposed at a joint that rotatably supports the at least one arm, the at least one gear rotating the at least one arm; and a detector disposed to face the at least one gear and configured to detect a temperature of the at least one gear without contacting the at least one gear.

Method for controlling an electric actuation assembly (1), the method comprising the following steps:

applying a plurality of known first output forces and recording a plurality of first input intensities for a first movement direction of the output;

establishing, by interpolation, a first characteristic function;

applying a plurality of second known output torques and recording (2) a plurality of second input currents for a second movement direction of the output opposite to the first direction;

establishing, by interpolation, a second characteristic function;

establishing, on the basis of the first characteristic function, the second characteristic function, a magnetic constant of the motor (11) and a reduction ratio of a gearbox (12), and a control correction coefficient;

controlling the actuation assembly (1) by applying the control correction coefficient.

A method, device, and computer program product for compensating robot movement deviations caused by a gear box as well as to a robot arrangement including such a device. The device has a drift estimating block configured to obtain motor data ({dot over (q)}.sub.r) and motor torque data () related to the motor, determine a measure of the temperature of the gear box based on the motor data ({dot over (q)}.sub.r) and motor torque data () and estimate the drift (q) based on a drift value of the robot section, the drift value in turn being obtained based on the gearbox temperature measure and a gravitational torque (.sub.grav) of the motor, and a drift adjusting block (44) configured to adjust a control value (q.sub.r) used to control the positioning of the robot based on the estimated drift (q).

A robot comprising: a base; an articulated arm extending distally of the base and including two arm members coupled by a joint; a motor; a gearbox having an input shaft coupled to an output of the motor and an output shaft configured to drive relative motion of the arm members about the joint; a position sensor configured to sense relative position of the arm members about the joint; and a control system coupled to the arm configured to drive the motor, the control system being arranged to perform a calibration operation to estimate torque loss in the gearbox by the steps of (i) estimating the inertia of the portion of the arm distal of the joint for motion about the joint; (ii) applying a determined drive power to the motor; (iii) receiving from the position sensor position data indicating the motion of the arm in response to the applied drive power; and (iv) estimating the torque loss in the gearbox in dependence on the estimated inertia, the determined drive power and the position data.

A robot comprising: a base; an articulated arm extending distally of the base and including two arm members coupled by a joint; a motor; a gearbox having an input shaft coupled to an output of the motor and an output shaft configured to drive relative motion of the arm members about the joint; a position sensor configured to sense relative position of the arm members about the joint; and a control system coupled to the arm configured to drive the motor, the control system being arranged to perform a calibration operation to estimate torque loss in the gearbox by the steps of (i) estimating the inertia of the portion of the arm distal of the joint for motion about the joint; (ii) applying a determined drive power to the motor; (iii) receiving from the position sensor position data indicating the motion of the arm in response to the applied drive power; and (iv) estimating the torque loss in the gearbox in dependence on the estimated inertia, the determined drive power and the position data.

A method and system for use with actuation system to control a plurality of vanes disposed within a turbine engine, wherein a vane position sensor provides a vane position signal corresponding to a vane position of the plurality of vanes, the actuation system includes a plurality of motors engaged in response to the vane position signal, and a differential gearbox having a plurality of inputs operatively coupled to the plurality of motors and an output operatively coupled to the plurality of vanes, wherein an output speed of the output is a sum of a plurality of input speeds of the plurality of inputs.