Patent classifications
G05B2219/42005
Servo control apparatus
A disturbance suppressing system is incorporated in a servo control apparatus. In the disturbance suppressing system, a component e introduced in an output of a target plant due to a disturbance estimate error is amplified in a disturbance suppressing controller having a frequency characteristic corresponding to a magnitude of a plant error, which is a difference in transfer characteristics between the target plant and the plant model, and the amplified component e is fed back to a control input.
Feedback control device that suppresses disturbance vibration using machine learning, article manufacturing method, and feedback control method
The feedback control device takes information regarding a control deviation between a measured value and a target value of a controlled object as input, and outputs a control amount for the controlled object; comprising: a first control unit that takes information regarding the control deviation as input, and outputs a first control amount for the controlled object; a second control unit that takes information regarding the control deviation as input and outputs a second control amount for the controlled object, and in which a parameter for calculating the second control amount is determined by machine learning; an operation unit that operates the controlled object using the first control amount output from the first control unit and the second control amount output from the second control unit; and a sampling unit for thinning out at a predetermined period information regarding the control deviation input to the second control unit.
FEEDBACK CONTROL DEVICE, ARTICLE MANUFACTURING METHOD, AND FEEDBACK CONTROL METHOD
The feedback control device takes information regarding a control deviation between a measured value and a target value of a controlled object as input, and outputs a control amount for the controlled object; comprising:
a first control unit that takes information regarding the control deviation as input, and outputs a first control amount for the controlled object; a second control unit that takes information regarding the control deviation as input and outputs a second control amount for the controlled object, and in which a parameter for calculating the second control amount is determined by machine learning;
an operation unit that operates the controlled object using the first control amount output from the first control unit and the second control amount output from the second control unit; and a sampling unit for thinning out at a predetermined period information regarding the control deviation input to the second control unit.
MOTOR CONTROL DEVICE
A motor control device is a motor control device which controls a spindle motor of a machine tool, the device including: a low-pass filter which averages torque command values or drive current values of the spindle motor and calculates averaged load information of the spindle motor; and a time constant calculation unit which calculates, as a time constant of the low-pass filter, a first time constant based on a cut-off frequency according to the rotation number of the spindle driven by the spindle motor, or a second time constant based on a cut-off frequency according to a value produced by multiplying a of cutting tooth number of a tool by the rotation number of the spindle.
Positioning control device of actuator provided with strain wave gearing using H-∞ control
A positioning control device of an actuator provided with a strain wave gearing has a full-closed control system for feeding back a position of a load shaft, and driving and controlling a motor so as to position the load shaft at a target position. The full-closed control system has an H compensator designed so that, when a generalized plant having angular transmission error in the strain wave gearing as a disturbance input is assumed, an H norm of a transfer function from the disturbance input of the generalized plant to an evaluation output is a predetermined value or less. Mechanical vibration during positioning response caused by angular transmission error in the strain wave gearing can be reliably suppressed.
Positioning control device for actuator provided with strain wave gearing using full-closed control with state observer
A positioning control system is provided with a state-feedback control system with a state observer as a full-closed control system for driving and controlling a motor so that a load shaft, which is an output shaft of a strain wave gearing, is positioned at a target position on the basis of a load shaft position actually detected. The state observer estimates a motor shaft position and a motor velocity based on a control input for the motor and the load shaft position. The state-feedback control system feeds back the state quantity of the object of control using the load shaft position as well as estimated motor shaft position and estimated motor velocity obtained by the state observer. It is possible to suppress resonant vibration caused by angular transmission error in the strain wave gearing and perform highly accurate positioning.
POSITIONING CONTROL DEVICE FOR ACTUATOR PROVIDED WITH STRAIN WAVE GEARING USING FULL-CLOSED CONTROL WITH STATE OBSERVER
A positioning control system is provided with a state-feedback control system with a state observer as a full-closed control system for driving and controlling a motor so that a load shaft, which is an output shaft of a strain wave gearing, is positioned at a target position on the basis of a load shaft position actually detected. The state observer estimates a motor shaft position and a motor velocity based on a control input for the motor and the load shaft position. The state-feedback control system feeds back the state quantity of the object of control using the load shaft position as well as estimated motor shaft position and estimated motor velocity obtained by the state observer. It is possible to suppress resonant vibration caused by angular transmission error in the strain wave gearing and perform highly accurate positioning.
POSITIONING CONTROL DEVICE OF ACTUATOR PROVIDED WITH STRAIN WAVE GEARING USING H-INFINITY CONTROL
A positioning control device of an actuator provided with a strain wave gearing has a full-closed control system for feeding back a position of a load shaft, and driving and controlling a motor so as to position the load shaft at a target position. The full-closed control system has an H compensator designed so that, when a generalized plant having angular transmission error in the strain wave gearing as a disturbance input is assumed, an H norm of a transfer function from the disturbance input of the generalized plant to an evaluation output is a predetermined value or less. Mechanical vibration during positioning response caused by angular transmission error in the strain wave gearing can be reliably suppressed.
MECHATRONIC SYSTEM CONTROL METHOD, LITHOGRAPHIC APPARATUS CONTROL METHOD AND LITHOGRAPHIC APPARATUS
An embodiment provides a control method for controlling a mechatronic system. The method comprises providing a model of the mechatronic system, the model comprising a disturbance compensation parameter and modifying the disturbance compensation parameter by: obtaining a servo-error of the mechatronic system, obtaining a setpoint of the mechatronic system and determining, based on the setpoint and the model of the mechatronic system comprising the disturbance compensation parameter, a predicted servo-error of the mechatronic system, such that the disturbance compensation parameter is based on a correlation between the servo-error and the predicted servo-error. The method further comprises updating a feedforward transfer function of the mechatronic system based on the modified disturbance compensation parameter and continuously determining a control signal to control the mechatronic system using the updated feedforward transfer function.