A rigid-flexible coupling motion platform driven by a ball screw includes a base, a linear guide rail fixed to the base, a rigid-flexible coupling platform, a servo motor, a ball screw, a guide rail sliding block, a displacement sensor and a driving controller. The rigid-flexible coupling platform includes a frame and a workbench. The frame and the workbench are connected through a flexible hinge; the servo motor is configured to drive the ball screw; the workbench is connected with the ball screw; the frame is connected with the linear guide rail by the guide rail sliding block; the displacement sensor is configured to feed back the position of the workbench; and the driving controller controls the ball screw to drive the workbench to move according to different control modes. The advantages of the ball screw drive and the rigid-flexible coupling motion platform are fully combined, and the positioning precision of the platform is greatly improved.

A motor control device includes: a position command section configured to generate a position command for a control object; a position detecting section configured to detect a position of the control object or a position of a motor configured to drive the control object; and a position control section configured to control a position of the motor based on the position command and the detected position of the control object or the motor, in which at least one of the position command section and the position control section includes a vibration suppression filter configured to approximate a reverse characteristic of a vibration characteristic generated between the motor and the control object, and the vibration suppression filter changes a vibration suppression frequency according to at least one of the position and a mass of the control object.

A rigid-flexible coupling motion platform driven by a ball screw includes a base, a linear guide rail fixed to the base, a rigid-flexible coupling platform, a servo motor, a ball screw, a guide rail sliding block, a displacement sensor and a driving controller. The rigid-flexible coupling platform includes a frame and a workbench. The frame and the workbench are connected through a flexible hinge; the servo motor is configured to drive the ball screw; the workbench is connected with the ball screw; the frame is connected with the linear guide rail by the guide rail sliding block; the displacement sensor is configured to feed back the position of the workbench; and the driving controller controls the ball screw to drive the workbench to move according to different control modes. The advantages of the ball screw drive and the rigid-flexible coupling motion platform are fully combined, and the positioning precision of the platform is greatly improved.

A motor control device includes: a position command section configured to generate a position command for a control object; a position detecting section configured to detect a position of the control object or a position of a motor configured to drive the control object; and a position control section configured to control a position of the motor based on the position command and the detected position of the control object or the motor, in which at least one of the position command section and the position control section includes a vibration suppression filter configured to approximate a reverse characteristic of a vibration characteristic generated between the motor and the control object, and the vibration suppression filter changes a vibration suppression frequency according to at least one of the position and a mass of the control object.