G05B2219/45199

Ethercat liquid flow controller communication for substrate processing systems

In a substrate processing system, such as a chemical mechanical system, updated controller configuration data is obtained for a plurality of liquid flow controllers of the substrate processing system. Each of a plurality of liquid flow controllers (LFCs) coupled to an Ethernet for Control Automation Technology (EtherCAT) bus automatically downloads a copy of the updated controller configuration data through the EtherCAT bus. Each of the plurality of liquid flow controllers controls fluid flow of a separate fluid line from a plurality of fluid lines in the substrate processing system, fluid flow through the plurality of fluid lines is controlled using the plurality of liquid flow controllers having the updated controller configuration data.

Training spectrum generation for machine learning system for spectrographic monitoring

A method of generating training spectra for training of a neural network includes generating a plurality of theoretically generated initial spectra from an optical model, sending the plurality of theoretically generated initial spectra to a feedforward neural network to generate a plurality of modified theoretically generated spectra, sending an output of the feedforward neural network and empirically collected spectra to a discriminatory convolutional neural network, determining that the discriminatory convolutional neural network does not discriminate between the modified theoretically generated spectra and empirically collected spectra, and thereafter, generating a plurality of training spectra from the feedforward neural network.

Physical device inspection or repair

In certain embodiments, device inspection or repair may be facilitated via signal-based determinations. In some embodiments, one or more flaws may be detected on a portion of a device via an optical sensor. Based on the detection, a physical structure may be caused to physically interact with the portion of the user device. Information indicating signals from the physical interaction may be obtained. Based on the signal information, a determination of whether a repair process should be performed on the device may be effectuated. The device may be assigned to be repaired via the repair process based on the determination indicating that the repair process should be performed on the device. In some embodiments, the signal information may be provided to a prediction model to determine whether the repair process should be performed on the device.

APPARATUS AND METHOD FOR AUTOMATED MOLD POLISHING
20230127208 · 2023-04-27 · ·

An apparatus for automated mold polishing is disclosed. In an embodiment, the apparatus comprises at least a processor and a memory communicatively connected to the processor. The memory containing instructions configuring the at least a processor to receive a finish assignment for at least a surface of a part for manufacture. The processor then determines a polish strategy for the at least a surface as a function of a geometry of the at least a surface. A polishing tool may then be selected for the at least a surface as a function of the finish assignment and the polish strategy for the at least a surface. A reachable area is then determined of the at least a surface as a function of the polishing tool. The processor then generates a toolpath as a function of the reachable area.

Method for detecting, controlling and automatically compensating pressure in a polishing process

The invention relates to a method for detecting, controlling and automatically compensating pressure in a polishing process, including: detecting a pressure between a polishing wheel and a polished workpiece by a detection shaft or a moment generated on the detection shaft, and outputting the detected pressure or moment to a controller; comparing the detected pressure or moment with a preset pressure or moment and determining whether there is a difference between them; calculating a compensation feeding amount based on the difference and outputting an adjustment signal to an adjustment shaft based on the compensation feeding amount; and moving the adjustment shaft correspondingly based on the adjustment signal so as to drive the polishing wheel or the polished workpiece to move correspondingly to adjust a relative position between the polishing wheel and the polished workpiece so that the difference keeps consistent.

Training spectrum generation for machine learning system for spectrographic monitoring

A method of generating training spectra for training of a neural network includes measuring a first plurality of training spectra from one or more sample substrates, measuring a characterizing value for each training spectra of the plurality of training spectra to generate a plurality of characterizing values with each training spectrum having an associated characterizing value, measuring a plurality of dummy spectra during processing of one or more dummy substrates, and generating a second plurality of training spectra by combining the first plurality of training spectra and the plurality of dummy spectra, there being a greater number of spectra in the second plurality of training spectra than in the first plurality of training spectra. Each training spectrum of the second plurality of training spectra having an associated characterizing value.

Method for controlling the polishing of gemstones
11673228 · 2023-06-13 · ·

A method for controlling the polishing of a gemstone includes: obtaining a three-dimensional model of the gemstone; fixing the gemstone in a dop, wherein an initial facet to be polished is aligned; obtaining at least one image of the initial facet; based on the obtained at least one image and the obtained three-dimensional model, determining at least first setting parameters for a first planned facet positioned between the initial facet and a desired final polished facet; setting the dop for obtaining a polished gemstone having a polished facet approaching the first planned facet; obtaining at least one image of the polished facet; based on the obtained at least one image of the polished facet and the three-dimensional model, determining at least further setting parameters for a further planned facet; setting the dop for obtaining a polished gemstone having a polished facet approaching the further planned facet.

ETHERCAT LIQUID FLOW CONTROLLER COMMUNICATION FOR SUBSTRATE PROCESSING SYSTEMS

In a substrate processing system, such as a chemical mechanical system, updated controller configuration data is obtained for a plurality of liquid flow controllers of the substrate processing system. Each of a plurality of liquid flow controllers (LFCs) coupled to an Ethernet for Control Automation Technology (EtherCAT) bus automatically downloads a copy of the updated controller configuration data through the EtherCAT bus. Each of the plurality of liquid flow controllers controls fluid flow of a separate fluid line from a plurality of fluid lines in the substrate processing system, fluid flow through the plurality of fluid lines is controlled using the plurality of liquid flow controllers having the updated controller configuration data.

Training Spectrum Generation for Machine Learning System for Spectrographic Monitoring

A method of generating training spectra for training of a neural network includes measuring a first plurality of training spectra from one or more sample substrates, measuring a characterizing value for each training spectra of the plurality of training spectra to generate a plurality of characterizing values with each training spectrum having an associated characterizing value, measuring a plurality of dummy spectra during processing of one or more dummy substrates, and generating a second plurality of training spectra by combining the first plurality of training spectra and the plurality of dummy spectra, there being a greater number of spectra in the second plurality of training spectra than in the first plurality of training spectra. Each training spectrum of the second plurality of training spectra having an associated characterizing value.

Apparatus and method for automated mold polishing
11806834 · 2023-11-07 · ·

An apparatus for automated mold polishing is disclosed. In an embodiment, the apparatus comprises at least a processor and a memory communicatively connected to the processor. The memory containing instructions configuring the at least a processor to receive a finish assignment for at least a surface of a part for manufacture. The processor then determines a polish strategy for the at least a surface as a function of a geometry of the at least a surface. A polishing tool may then be selected for the at least a surface as a function of the finish assignment and the polish strategy for the at least a surface. A reachable area is then determined of the at least a surface as a function of the polishing tool. The processor then generates a toolpath as a function of the reachable area.