Various embodiments of the teachings herein include a method for controlling a robot with a tool carried along a path with preset positions and preset directions at a plurality of points. The method may include: at a plurality of points, controlling the robot according to a preset angle of each joint of a plurality of joints; obtaining an actual position and an actual direction of the tool at the points while the robot carries the tool along the path according to the preset angles; determining an actual movement parameter of the robot at a point based on the actual positions and the actual directions; determining an adjusted angle of each joint at each point based on the actual movement parameter so the positions and the directions are consistent with the preset positions and the preset directions at the plurality of points; and controlling the robot to move the tool along the path according to the adjusted angles.

Methods of constructing a process model for simulating a characteristic of a product of lithography from patterns produced under different processing conditions. The methods use a deviation between the variation of the simulated characteristic and the variation of the measured characteristic to adjust a parameter of the process model.

A numerical controller uses a work lattice region setting unit and a rotation axis work lattice region setting unit to form lattice points for error correction and uses a work-caused translation correction amount setting unit to set a correction amount of a work-caused translation error. A work-caused translation correction amount calculation unit calculates a correction amount at a tool center point position, and a correction section of the numerical controller adds the work-caused translation correction amount to positions of three commanded linear axes for error correction.

A machine tool includes: a spindle that causes a tool to rotate and move; a workpiece rotation mechanism that causes a workpiece W to rotate; a control unit that controls the spindle and the workpiece rotation mechanism in accordance with commands from a program; and a cutting load detection unit that detects a cutting load imparted on the workpiece by the tool, and the control unit controls a cutting route such that a cutting depth of the workpiece cut with the tool in a region with a small cutting load is greater than the cutting depth in a region with a large cutting load within such a range that the cutting load detected by the cutting load detection unit does not exceed a predetermined load.

The present invention relates to a method and a device for controlling an ultrasound tool unit for machining a workpiece on a machine tool. For this, a plurality of parameter sets are stored on a storage device of a control device of the machine tool. When controlling an ultrasound transducer of the ultrasound tool unit received on a work spindle of the machine tool on the basis of a sensor signal input into a controller by means of a generator operated by the controller, on the basis of a first parameter set, which is associated with the ultrasound tool unit and sets the operation of the controller, an operating setting of the controller is switched by changing the first parameter set setting the operation of the controller on the basis of a second parameter set, which is associated with the ultrasound tool unit, of the plurality of parameter sets stored on the storage device.

A personal computer for setting of parameters of a machine tool acquires adjusted parameters, adjusted by a numerical controller or a simulator, from the numerical controller or the simulator, makes a comparison between an axis configuration of the machine tool set up by a user and an axis configuration of the adjusted parameter adjusted by the numerical controller or the simulator, and converts the axis configuration of the adjusted parameters into the axis configuration set up by the user.

A personal computer for setting of parameters of a machine tool acquires adjusted parameters, adjusted by a numerical controller or a simulator, from the numerical controller or the simulator, makes a comparison between an axis configuration of the machine tool set up by a user and an axis configuration of the adjusted parameter adjusted by the numerical controller or the simulator, and converts the axis configuration of the adjusted parameters into the axis configuration set up by the user.

A machine tool includes: a spindle that causes a tool to rotate and move; a workpiece rotation mechanism that causes a workpiece W to rotate; a control unit that controls the spindle and the workpiece rotation mechanism in accordance with commands from a program; and a cutting load detection unit that detects a cutting load imparted on the workpiece by the tool, and the control unit controls a cutting route such that a cutting depth of the workpiece cut with the tool in a region with a small cutting load is greater than the cutting depth in a region with a large cutting load within such a range that the cutting load detected by the cutting load detection unit does not exceed a predetermined load.

Methods of constructing a process model for simulating a characteristic of a product of lithography from patterns produced under different processing conditions. The methods use a deviation between the variation of the simulated characteristic and the variation of the measured characteristic to adjust a parameter of the process model.