Methods of performing a plurality of operations within a region of a part utilizing an end effector of a robot and robots that perform the methods are disclosed herein. The methods include collecting a spatial representation of the part and aligning a predetermined raster scan pattern for movement of the end effector relative to the part with the spatial representation of the part. The methods also include defining a plurality of normality vectors for the part at a plurality of predetermined operation locations for operation of the end effector. The methods further include moving the end effector relative to the part and along the predetermined raster scan pattern. The methods also include orienting the end effector such that an operation device of the end effector faces toward each operation location along a corresponding normality vector and executing a corresponding operation of the plurality of operations with the operation device.

A method of machining an elongate workpiece extending along a longitudinal axis and shaped to be supported rotationally instably about the longitudinal axis includes sensing a rotation of the workpiece about the longitudinal axis, thereby yielding a sensing result; and machining the workpiece at the machining station at least partly in dependence of the sensing result.

Methods of performing a plurality of operations within a region of a part utilizing an end effector of a robot and robots that perform the methods are disclosed herein. The methods include collecting a spatial representation of the part and aligning a predetermined raster scan pattern for movement of the end effector relative to the part with the spatial representation of the part. The methods also include defining a plurality of normality vectors for the part at a plurality of predetermined operation locations for operation of the end effector. The methods further include moving the end effector relative to the part and along the predetermined raster scan pattern. The methods also include orienting the end effector such that an operation device of the end effector faces toward each operation location along a corresponding normality vector and executing a corresponding operation of the plurality of operations with the operation device.

An automated system for manipulating a workpiece includes a machining device, a locating device configured to determine a position of a workpiece, and a positioning system operatively connected to the machining device and being configured to adjust a position of the machining device to align a centerline of the machining device with a longitudinal axis of the workpiece, based upon the determined position of the workpiece. The machining device includes a stabilizing mechanism to engage the workpiece to maintain the workpiece in the determined position, and a cutting element for performing a machining operation on the workpiece.

A method and an apparatus for detecting and correcting a spatial position of a workpiece held in a positioning device, wherein a machining head having at least one sensor and position sensor is fed into at least one measuring position. Contactless sensing of an actual position of a measuring point of the workpiece is carried out at the measuring position using the machining head and the sensed actual position is compared with an expected nominal position and deviation values between the actual position and the nominal position are ascertained. The ascertained deviation values are compared with an admissible tolerance value and the machining head is fed to a contour when the ascertained deviation is within the admissible tolerance value, or the machining head and the workpiece are oriented with respect to one another and to the contour such that a deviation of the actual position is within the admissible tolerance values following orientation.

An automated system for manipulating a workpiece includes a machining device, a locating device configured to determine a position of a workpiece, and a positioning system operatively connected to the machining device and being configured to adjust a position of the machining device to align a centerline of the machining device with a longitudinal axis of the workpiece, based upon the determined position of the workpiece. The machining device includes a stabilizing mechanism to engage the workpiece to maintain the workpiece in the determined position, and a cutting element for performing a machining operation on the workpiece.

An alignment apparatus for aligning a wafer includes a mounting unit, an imaging unit, an elevation unit, and a controlling unit. The control unit outputs a control signal for controlling the elevation unit such that a luminance variation between the outer side and the inner side of the wafer obtained by the imaging unit becomes the same as a luminance variation obtained when the imaging unit is focused, for estimating a warpage state of the wafer based on an amount of relative movement of the imaging unit and the mounting unit with respect to a relative height position of the imaging unit and the mounting unit obtained when the imaging unit is focused on a reference wafer having no warpage, and for detecting the alignment mark of the wafer by the imaging unit by rotating the mounting unit in a state where the imaging unit is focused.

A method of machining an elongate workpiece extending along a longitudinal axis and shaped to be supported rotationally instably about the longitudinal axis includes sensing a rotation of the workpiece about the longitudinal axis, thereby yielding a sensing result; and machining the workpiece at the machining station at least partly in dependence of the sensing result.