In a controller, a machine learning device, and a system that are capable of addressing change in a clamping force without use of expensive equipment, the controller includes the machine learning device that observes machining condition data indicating machining conditions for cutting, spindle torque data indicating spindle torque during the cutting, and cutting force component direction data indicating cutting force component direction information on cutting resistance against a cutting force, as state variables representing a current state of an environment, and that carries out learning or decision making with use of a learning model modelling the machining conditions for the cutting on which the cutting force that allows holding by a clamping force from a machining jig is exerted on a workpiece based on the state variables.

A work piece processing device includes a tool device, a work piece holder and a servo-elastic actuator system having simultaneous precision force and position control that moves one of the tool device and the work piece holder to the other of the tool device and work piece holder. The servo-actuator system including a servo-actuator, a compliance elastic member and a weight compensation elastic member disposed in a force transmission path with the compliance elastic member and the weight compensation elastic member disposed with respect to each other so that a spring force exerted by the weight compensation elastic member is opposed to a spring force exerted by the compliance elastic member.

A system and method for minimizing the damage to the backside of a workpiece disposed on a platen during thermal transitions is disclosed. The system includes a controller that modulates the clamping voltage and backside gas pressure during the thermal transition. By modulating the clamping voltage, the workpiece may not be as tightly held to the platen at certain times, thus minimizing damage that may be caused by particles resident on the top surface of the platen. Furthermore, the modulation of the backside gas pressure still permits good thermal conductivity between the platen and the workpiece.

A machining assistance system for assisting a machining apparatus includes: a workpiece supporting force generating unit, which generates workpiece supporting force against machining reaction force that is exerted on a machining portion of a workpiece by a working tool; a supporting device, which moves the supporting force generating unit while supporting the supporting force generating unit; and a workpiece supporting force control device, which controls operation of the workpiece supporting force generating unit and operation of the supporting device based on machining reaction force related data related to the machining reaction force and machining position related data related to a machining position of the working tool, such that the workpiece supporting force generating unit exerts the workpiece supporting force on the workpiece against the machining reaction force.

In a controller, a machine learning device, and a system that are capable of addressing change in a clamping force without use of expensive equipment, the controller includes the machine learning device that observes machining condition data indicating machining conditions for cutting, spindle torque data indicating spindle torque during the cutting, and cutting force component direction data indicating cutting force component direction information on cutting resistance against a cutting force, as state variables representing a current state of an environment, and that carries out learning or decision making with use of a learning model modelling the machining conditions for the cutting on which the cutting force that allows holding by a clamping force from a machining jig is exerted on a workpiece based on the state variables.

A work piece processing device includes a tool device, a work piece holder and a servo-elastic actuator system having simultaneous precision force and position control that moves one of the tool device and the work piece holder to the other of the tool device and work piece holder. The servo-actuator system including a servo-actuator, a compliance elastic member and a weight compensation elastic member disposed in a force transmission path with the compliance elastic member and the weight compensation elastic member disposed with respect to each other so that a spring force exerted by the weight compensation elastic member is opposed to a spring force exerted by the compliance elastic member.

A system and method for minimizing the damage to the backside of a workpiece disposed on a platen during thermal transitions is disclosed. The system includes a controller that modulates the clamping voltage and backside gas pressure during the thermal transition. By modulating the clamping voltage, the workpiece may not be as tightly held to the platen at certain times, thus minimizing damage that may be caused by particles resident on the top surface of the platen. Furthermore, the modulation of the backside gas pressure still permits good thermal conductivity between the platen and the workpiece.

A work piece processing device includes a tool piece, a work piece holder and a servo-elastic actuator system having simultaneous precision force and position control that moves one of the tool piece and the work piece holder to the other of the tool piece and work piece holder.