A method for dynamically compensating angle errors when operating a machine tool that includes at least one fixture for a workpiece, in or on which a workpiece can be secured, at least one toolholder, in or on which a tool, in particular a drill, can be secured and can be rotationally driven by a rotational drive of the toolholder. The rotational drive including at least one horizontal drive by which the toolholder — for purposes of machining the workpiece —can execute movements in at least one horizontal plane of the machine tool. The machine tool further includes at least one vertical drive by which the toolholder can execute movements in a vertical direction of the machine tool, and at least one controller to which the rotational drive, the horizontal drive, and the vertical drive are functionally assigned.

A batch production system comprising a machine tool for consecutively machining a batch of workpieces into machined pieces, the machine tool comprising a workpiece support configured for supporting the workpieces, a cutting tool, a movement system configured for providing a relative movement between the cutting tool and the workpiece support with at least two degrees of freedom, a control unit configured for controlling the movement system based on numerical control data and compensation data for compensating volumetric positioning errors of the movement system. The numerical control data are based on nominal geometry data representing a target piece that is desired to be achieved when machining the batch of workpieces into the machined pieces.

Provided is a thermal displacement correction method using a machine learning method but making it possible to, on a user side, calculate a thermal displacement amount appropriate to a machine tool of the user and correct the thermal displacement. In a machine tool on a target user side, a thermal displacement amount between workpiece and tool corresponding to a temperature at a preset measurement point is calculated based on a parameter defining a relation between the temperature and the thermal displacement amount, and a positioning position for workpiece and tool is corrected in accordance with the calculated thermal displacement amount. On a manufacturer side, operational status information of the machine tool on the target user side is obtained, an operational status identical to the obtained operational status on the target user side is reproduced with a machine tool of a same type as the machine tool on the target user side based on the obtained operational status information, a temperature at a measurement point identical to the measurement point on the machine tool on the target user side and a thermal displacement amount between workpiece and tool are measured during reproduction, and the parameter is calculated by machine learning based on the measured temperature and thermal displacement amount. The parameter in the machine tool on the target user side is updated with the calculated parameter.

Provided is a thermal displacement correction method using a machine learning method but making it possible to, on a user side, calculate a thermal displacement amount appropriate to a machine tool of the user and correct the thermal displacement. In a machine tool on a target user side, a thermal displacement amount between workpiece and tool corresponding to a temperature at a preset measurement point is calculated based on a parameter defining a relation between the temperature and the thermal displacement amount, and a positioning position for workpiece and tool is corrected in accordance with the calculated thermal displacement amount. On a manufacturer side, operational status information of the machine tool on the target user side is obtained, an operational status identical to the obtained operational status on the target user side is reproduced with a machine tool of a same type as the machine tool on the target user side based on the obtained operational status information, a temperature at a measurement point identical to the measurement point on the machine tool on the target user side and a thermal displacement amount between workpiece and tool are measured during reproduction, and the parameter is calculated by machine learning based on the measured temperature and thermal displacement amount. The parameter in the machine tool on the target user side is updated with the calculated parameter.

Disclosed are systems and methods for measuring the temperature change of one or more substrates within a semiconductor processing system. The temperature change information may be used to optimize throughput of substrates within the system and to troubleshoot quality issues that may be impacted by temperature.

The present disclosure is directed toward a method that includes logging offset data of a machine over a period of operational time having varying thermal conditions, comparing the logged offset data against a thermal model, estimating offsets for the machine based on the comparing, and adjusting offsets of the machine during operation.

A numerical-control machine tool is provided that includes a tool-holder head which is provided with a tool-holder spindle and is capable of rotating/tilting the tool-holder spindle about two different rotation axes inclined to one another; a movable supporting structure that supports the tool-holder head and is provided with moving members adapted to move the tool-holder head in the space around the piece to be machined, during machining of the piece; one or more inclinometer microsensors that are located on the movable supporting structure of the machine, next to the tool-holder head, and are adapted to measure/determine the tilt of the element on which the same sensors are mounted, relative to a reference inertial plane immobile in the space; and an electronic control device that commands the various moving members of the movable supporting structure and of the tool-holder head, that is electronically connected to the one or more inclinometer microsensors and is adapted to control, during machining of the piece, the different moving members of the movable supporting structure and of the tool-holder head based on the signals arriving from the inclinometer microsensor(s), so as to correct the spatial position and/or the orientation of the tool-holder spindle based on the signals arriving from the one or more inclinometer microsensors.

The present disclosure concerns machine tools and more specifically compensation of variations which may occur within a multi-axis machine tool during a cutting process. An example embodiment includes a method of machining a workpiece using a machine tool comprising a machining head and a workpiece holder moveable relative to each another the method comprising: performing a first machining operation on a workpiece mounted to the workpiece holder according to a first programmed series of movements of the machining head relative to the workpiece holder, the first machining operation having a first maximum machining tolerance; performing a second machining operation on the workpiece according to a second programmed series of movements of the machining head relative to the workpiece holder, the second machining operation having a second maximum machining tolerance; performing a measurement operation to determine a position of an artefact on the machine tool; calculating an offset relative to a corresponding previously stored position of the artefact; and applying the offset to the second programmed series of movements prior to performing the second machining operation, wherein the second maximum machining tolerance is smaller than the first maximum machining tolerance.

The present disclosure concerns machine tools and more specifically compensation of variations which may occur within a multi-axis machine tool during a cutting process. An example embodiment includes a method of machining a workpiece using a machine tool comprising a machining head and a workpiece holder moveable relative to each another the method comprising: performing a first machining operation on a workpiece mounted to the workpiece holder according to a first programmed series of movements of the machining head relative to the workpiece holder, the first machining operation having a first maximum machining tolerance; performing a second machining operation on the workpiece according to a second programmed series of movements of the machining head relative to the workpiece holder, the second machining operation having a second maximum machining tolerance; performing a measurement operation to determine a position of an artefact on the machine tool; calculating an offset relative to a corresponding previously stored position of the artefact; and applying the offset to the second programmed series of movements prior to performing the second machining operation, wherein the second maximum machining tolerance is smaller than the first maximum machining tolerance.

A numerical-control machine tool is provided that includes a tool-holder head which is provided with a tool-holder spindle and is capable of rotating/tilting the tool-holder spindle about two different rotation axes inclined to one another; a movable supporting structure that supports the tool-holder head; inclinometer microsensor(s) that are located on the movable supporting structure of the machine to measure/determine the tilt of the element on which the sensors are mounted; and an electronic control device that commands the moving members of the movable supporting structure and of the tool-holder head. The electronic control device is electronically connected to the inclinometer microsensor(s) controls the moving members of the movable supporting structure and of the tool-holder head based on signals arriving from the inclinometer microsensor(s), so as to correct the spatial position and/or the orientation of the tool-holder spindle.