A method for operating a planar drive system is specified. The planar drive system comprises a stator, a plurality of rotors and a main controller. The stator comprises a plurality of energizable stator conductors. Energizing of stator conductors of the stator can be controlled via the main controller. Each rotor comprises a magnet device having at least one rotor magnet. A magnetic interaction can be produced between energized stator conductors of the stator and the magnet devices of the rotors in order to drive the rotors. At least one individual rotor identifier is assigned to each rotor. An identification of the rotors is carried out by providing position information of the rotors and rotor identifiers of the rotors and linking the provided position information of the rotors to the provided rotor identifiers of the rotors via the main controller.

A measurement control system for a multi-shaft supported air floatation platform, the system comprising a load feedback unit (5), an execution unit (6), a position measurement unit (7), a safety protection unit (8), a controller (9), a rotating motor (10), and a linear light source 11; the load feedback unit comprises M pressure sensors (5-1) and four differential sensors (5-2); the execution unit comprises M servo voice coil motors (6-1) and M servo voice coil motor drivers (6-2); the position measurement unit comprises a plane grating (7-1), M linear gratings (7-2) a linear array CCD (7-3), a tilt sensor (7-4), M electronic levels (7-5), and an indoor GPS (7-6); the safety protection unit comprises 2M proximity sensors (8-1) and M temperature sensors (8-2); and the linear array CCD consists of no few then six CCDs. The system solves the problems of leveling limitations and narrow application range of existing supporting platforms.

A positioning system having a flat base comprising (i) a X-axis assembly having a X-axis linear actuator means arranged orthogonal to the Y-axis; (ii) a Y-axis assembly having a pair of Y-axis linear actuator means mounted onto the flat base forming a H-configuration; (iii) a Z-axis assembly having an aerostatic bearing mechanism that floats on thin film of externally pressurized air on top of the flat base; and a -axis actuator anchored from the X-axis to drive the Z-axis assembly which carries a workpiece, wherein the Z-axis assembly is rotated with the rotary axis for the -axis perpendicular to the flat base.