In a substrate processing system, such as a chemical mechanical system, updated controller configuration data is obtained for a plurality of liquid flow controllers of the substrate processing system. Each of a plurality of liquid flow controllers (LFCs) coupled to an Ethernet for Control Automation Technology (EtherCAT) bus automatically downloads a copy of the updated controller configuration data through the EtherCAT bus. Each of the plurality of liquid flow controllers controls fluid flow of a separate fluid line from a plurality of fluid lines in the substrate processing system, fluid flow through the plurality of fluid lines is controlled using the plurality of liquid flow controllers having the updated controller configuration data.

In a substrate processing system, such as a chemical mechanical system, updated controller configuration data is obtained for a plurality of liquid flow controllers of the substrate processing system. Each of a plurality of liquid flow controllers (LFCs) coupled to an Ethernet for Control Automation Technology (EtherCAT) bus automatically downloads a copy of the updated controller configuration data through the EtherCAT bus. Each of the plurality of liquid flow controllers controls fluid flow of a separate fluid line from a plurality of fluid lines in the substrate processing system, fluid flow through the plurality of fluid lines is controlled using the plurality of liquid flow controllers having the updated controller configuration data.

A numerical control device according to an aspect of the present disclosure controls, in accordance with a machining program, a machine tool that includes a plurality of machining systems performing machining by each causing a tool to act on a workpiece, and can perform tool oscillation that causes a relative speed of the tool in relation to the workpiece to periodically change in at least one of the machining systems, the numerical control device including: a condition change unit which, upon newly starting machining by one of the machining systems, in a case of another of the machining systems performing machining for which a presence/absence of the tool oscillation differs from the newly starting machining, changes a condition of the newly starting machining or the machining for which the presence/absence of the tool oscillation differs, from a condition derived from the machining program.

A numerical control device according to an aspect of the present disclosure controls, in accordance with a machining program, a machine tool that includes a plurality of machining systems performing machining by each causing a tool to act on a workpiece, and can perform tool oscillation that causes a relative speed of the tool in relation to the workpiece to periodically change in at least one of the machining systems, the numerical control device including: a condition change unit which, upon newly starting machining by one of the machining systems, in a case of another of the machining systems performing machining for which a presence/absence of the tool oscillation differs from the newly starting machining, changes a condition of the newly starting machining or the machining for which the presence/absence of the tool oscillation differs, from a condition derived from the machining program.

A numerical controller of the present invention is provided with an oscillating motion data holding unit configured to hold oscillating motion data used for the control of an oscillating motion, an oscillating pulse calculation unit configured to calculate oscillating pulses used for the control of an oscillation axis, based on the oscillating motion data held in the oscillating motion data holding unit, and output the calculated oscillating pulses, a motor control unit configured to control a motor for driving the oscillation axis, based on the oscillating pulses, and an oscillating motion data calculation unit configured to determine a data item related to the oscillating motion to be adjusted, based on the state of a switch means on a control panel of a machine, and to adjust the value of the data item related to the oscillating motion, based on manual pulses input from a manual pulse generator.

A numerical controller of the present invention is provided with an oscillating motion data holding unit configured to hold oscillating motion data used for the control of an oscillating motion, an oscillating pulse calculation unit configured to calculate oscillating pulses used for the control of an oscillation axis, based on the oscillating motion data held in the oscillating motion data holding unit, and output the calculated oscillating pulses, a motor control unit configured to control a motor for driving the oscillation axis, based on the oscillating pulses, and an oscillating motion data calculation unit configured to determine a data item related to the oscillating motion to be adjusted, based on the state of a switch means on a control panel of a machine, and to adjust the value of the data item related to the oscillating motion, based on manual pulses input from a manual pulse generator.