A Coordinate Measuring Machine (CMM) system comprising a CMM, a rotary table, and a rotation arrangement, wherein the CMM system is configured to be calibrated by determining the 6 dof pose of a jig, and to a method for calibrating. The jig may be mounted such that a current pose of the jig is associated with a current pose of the rotary table with respect to the CMM. The rotary table may be moved into multiple poses, and the 6 dof pose of the jig is measured for each of the multiple poses of the rotary table. An error map is generated, based on the angles associated with the poses of the rotary table, and is used to generate a coordinate transformation from the CMM coordinate system to the part coordinate system, which is associated with the rotary table, based on the error map.

A control data generation device includes a computation unit calculating a control command based on rotational information or temporal information. The rotational information specifies a relationship between a specific rotation angle or specific rotational position during one spindle revolution and a position of the driven device. The temporal information specifies a relationship between a specific elapsed time during one spindle revolution and the position of the driven device. It also includes a display control unit controlling displaying the control command. Upon reception of an order to display temporal information during displaying rotational information, the rotational information is converted into the temporal information, and the obtained temporal information is displayed on the display device. Upon reception of an order to display rotational information during displaying temporal information, the computation unit converts the temporal information into the rotational information, and displays the rotational information obtained by the conversion.

A control data generation device includes a computation unit calculating a control command based on rotational information or temporal information. The rotational information specifies a relationship between a specific rotation angle or specific rotational position during one spindle revolution and a position of the driven device. The temporal information specifies a relationship between a specific elapsed time during one spindle revolution and the position of the driven device. It also includes a display control unit controlling displaying the control command. Upon reception of an order to display temporal information during displaying rotational information, the rotational information is converted into the temporal information, and the obtained temporal information is displayed on the display device. Upon reception of an order to display rotational information during displaying temporal information, the computation unit converts the temporal information into the rotational information, and displays the rotational information obtained by the conversion.

A vacuum processing apparatus includes: a processing container having top and bottom walls, a sidewall, and an interior that is kept in a vacuum atmosphere; a stage provided inside the processing container to hold a substrate placed on the stage so as to face the top wall; a support member penetrating the bottom wall to support the stage from below; a tilt changer provided at an end portion of the support member located outside the processing container to change a tilt of the stage relative to the top wall; at least one distance meter configured to measure a distance between the top wall and the stage at a measurement position on a surface of the top wall facing the stage; and a controller that controls the tilt changer to make the top wall and the stage parallel to each other based on the distance between the top wall and the stage.

A machine tool includes a clamping mechanism for clamping/unclamping rotation of a rotary table. A load is measured when an unclamping command is output and then the rotary table is rotated after a set time set in the timer passes, and the set time of the timer is changed in response to a magnitude of the measured load. In this way, it is possible to prevent the clamping mechanism from being damaged due to a subsequent command given before unclamping ends, and extend a life span of a component.

A Coordinate Measuring Machine (CMM) system comprising a CMM, a rotary table, and a rotation arrangement, wherein the CMM system is configured to be calibrated by determining the 6 dof pose of a jig, and to a method for calibrating. The jig may be mounted such that a current pose of the jig is associated with a current pose of the rotary table with respect to the CMM. The rotary table may be moved into multiple poses, and the 6 dof pose of the jig is measured for each of the multiple poses of the rotary table. An error map is generated, based on the angles associated with the poses of the rotary table, and is used to generate a coordinate transformation from the CMM coordinate system to the part coordinate system, which is associated with the rotary table, based on the error map.