A robot employing an operation program setting apparatus is configured to move, based on an operation program, a tool attached to a distal end portion of an arm of the robot along a predetermined processing trajectory along a work object, the operation program makes posture of the tool change at at least a position along the predetermined processing trajectory, the position is a posture changing position. The setting apparatus includes a controller configured to add a command to the operation program, the command is for making the tool start to be inclined when the tool approaches the posture changing position within a range of an acceptable inclination angle, the range is an angle range within which the tool is allowed to be inclined with respect to a surface of the work object.

A robot employing an operation program setting apparatus is configured to move, based on an operation program, a tool attached to a distal end portion of an arm of the robot along a predetermined processing trajectory along a work object, the operation program makes posture of the tool change at at least a position along the predetermined processing trajectory, the position is a posture changing position. The setting apparatus includes a controller configured to add a command to the operation program, the command is for making the tool start to be inclined when the tool approaches the posture changing position within a range of an acceptable inclination angle, the range is an angle range within which the tool is allowed to be inclined with respect to a surface of the work object.

A positioning device is adapted for positioning a tool at a setpoint position on a flat substrate in an X-Y plane, the tool exerting a process force in its axial direction perpendicularly onto the substrate. The tool includes a multicomponent force sensor to measure unwanted process-force components in the lateral direction. The setpoint position of the tool is correctable by the positioning device such that the lateral process-force components are minimized.

A positioning device is adapted for positioning a tool at a setpoint position on a flat substrate in an X-Y plane, the tool exerting a process force in its axial direction perpendicularly onto the substrate. The tool includes a multicomponent force sensor to measure unwanted process-force components in the lateral direction. The setpoint position of the tool is correctable by the positioning device such that the lateral process-force components are minimized.