This conveyance system (190) comprises: a main control device (150) that receives a conveyance request for a workpiece (W) from a plurality of processing machines (1A, 1B); and a conveyance device (100) that conveys the workpiece (W) between a storage shelf (2) and the plurality of processing machines (1A, 1B). The main control device (150) transmits a standby signal indicating whether or not a plurality of conveyance requests are held in the main control device (150). A local control device (70) of the conveyance device (100) moves a carriage (10) with a first travel control parameter when the standby signal indicates that the plurality of conveyance requests are held in the main control device (150), and moves the carriage (10) with a second travel control parameter when the standby signal indicates that the plurality of conveyance requests are not held in the main control device.

There is provided a configuration that includes: at least one transfer mechanism configured to transfer a substrate and at least one processing mechanism configured to process the substrate; an earthquake detector configured to detect an earthquake; and a controller configured to control the at least one transfer mechanism and the at least one processing mechanism according to a detection result of the earthquake detector, wherein the controller is configured to be capable of performing a stopping operation of the at least one transfer mechanism according to a P wave (initial tremor wave) and an S wave (principal fluctuation wave).

There is provided a configuration that includes: at least one transfer mechanism configured to transfer a substrate and at least one processing mechanism configured to process the substrate; an earthquake detector configured to detect an earthquake; and a controller configured to control the at least one transfer mechanism and the at least one processing mechanism according to a detection result of the earthquake detector, wherein the controller is configured to be capable of performing a stopping operation of the at least one transfer mechanism according to a P wave (initial tremor wave) and an S wave (principal fluctuation wave).