A method wherein by reducing the amount of current, and therefore torque, to the linear servo motor (50) and/or rotary servo motor (52) of a loader mechanism (9), the loader mechanism is operable for determining proper workpiece positioning in a machine tool such as a gear manufacturing machine, particularly a machine (4) for manufacturing bevel and hypoid gears

A method wherein by reducing the amount of current, and therefore torque, to the linear servo motor (50) and/or rotary servo motor (52) of a loader mechanism (9), the loader mechanism is operable for determining proper workpiece positioning in a machine tool such as a gear manufacturing machine, particularly a machine (4) for manufacturing bevel and hypoid gears.

Embodiments of the present disclosure provide methodology to match and calibrate processing chamber performance in a processing chamber. In one embodiment, a method for calibrating a processing chamber for semiconductor manufacturing process includes performing a first predetermined process in a processing chamber, collecting a first set of signals transmitted from a first group of sensors disposed in the processing chamber to a controller while performing the predetermined process, analyzing the collected first set of signals, comparing the collected first set of signals with database stored in the controller to check sensor responses from the first group of sensors, calibrating sensors based on the collected first set of signals when a mismatch sensor response is found, subsequently performing a first series of processes in the processing chamber, and collecting a second set of signals transmitted from the sensors to the controller while performing the series of processes.

A multi-story goods storage arrangement comprising a plurality of levels of storage lines arranged in parallel and transport lines extending between opposing ends of said storage lines, wherein a transfer cart is operable along each transport line. It further comprises a top shuttle suspending from top rail arrangement on said transfer cart and moveable out from said transfer cart into a suspension rail arrangement in said storage lines, and lifting means arranged on said top shuttle to lift goods stored in said storage lines and to transport lifted goods to the transfer cart.

Embodiments of the present disclosure provide methodology to match and calibrate processing chamber performance in a processing chamber. In one embodiment, a method for calibrating a processing chamber for semiconductor manufacturing process includes performing a first predetermined process in a processing chamber, collecting a first set of signals transmitted from a first group of sensors disposed in the processing chamber to a controller while performing the predetermined process, analyzing the collected first set of signals, comparing the collected first set of signals with database stored in the controller to check sensor responses from the first group of sensors, calibrating sensors based on the collected first set of signals when a mismatch sensor response is found, subsequently performing a first series of processes in the processing chamber, and collecting a second set of signals transmitted from the sensors to the controller while performing the series of processes.