A pressure balanced thermal actuator includes a flow housing having an inlet and an outlet, with the flow housing being affixed at opposing ends to two bellows housings, each of which contains a bellows. An actuation rod is operably coupled to each bellows and contains a fluid passage therewithin. When the temperature of the area surrounding the actuator increases, the pressure inside the bellows housings increases, and exerts a force on the bellows therein, compressing it. As a result, the actuation rod moves from a first position to a second position to align the fluid passage with the inlet and the outlet, enabling the controlled passage of a first fluid from the inlet, and through the fluid passage, to the outlet, to reduce the temperature of the area surrounding the valve assembly. The actuator is unaffected by changes in the ambient pressure, by working equally on two opposing bellows areas.

A pressure balanced thermal actuator includes a flow housing having an inlet and an outlet, with the flow housing being affixed at opposing ends to two bellows housings, each of which contains a bellows. An actuation rod is operably coupled to each bellows and contains a fluid passage therewithin. When the temperature of the area surrounding the actuator increases, the pressure inside the bellows housings increases, and exerts a force on the bellows therein, compressing it. As a result, the actuation rod moves from a first position to a second position to align the fluid passage with the inlet and the outlet, enabling the controlled passage of a first fluid from the inlet, and through the fluid passage, to the outlet, to reduce the temperature of the area surrounding the valve assembly. The actuator is unaffected by changes in the ambient pressure, by working equally on two opposing bellows areas.

A cooling system includes a coolant source to cool down components of a processing chamber and a return line for the coolant coupled between the processing chamber and the coolant source. The return line has a valve, which includes a flow compartment having a first inlet and an outlet that support a default flow rate of the coolant, the flow compartment also having a second inlet. The valve has a plunger with a tip to variably open and close the second inlet to vary a flow rate of the coolant from the default flow rate. The valve has a shape memory alloy (SMA) spring positioned on the plunger between a side of the valve and the tip, the SMA spring attached to the tip to variably withdraw the tip from the second inlet in response to a rise in temperature of the coolant above a threshold temperature value.

A cooling system includes a coolant source to cool down components of a processing chamber and a return line for the coolant coupled between the processing chamber and the coolant source. The return line has a valve, which includes a flow compartment having a first inlet and an outlet that support a default flow rate of the coolant, the flow compartment also having a second inlet. The valve has a plunger with a tip to variably open and close the second inlet to vary a flow rate of the coolant from the default flow rate. The valve has a shape memory alloy (SMA) spring positioned on the plunger between a side of the valve and the tip, the SMA spring attached to the tip to variably withdraw the tip from the second inlet in response to a rise in temperature of the coolant above a threshold temperature value.

Disclosed herein is a temperature actuated valve, including a stationary member and a movable member, wherein the stationary member is configured to receive the movable member. A first flow path is defined between an outer surface of the stationary member and an inner surface of a housing and a second flow path defined by and within the movable member. The temperature actuated valve further includes at least one temperature actuated member having a first end seated against a base of the stationary member and a second end seated against a base of the movable member. The temperature actuated valve further includes a bias member having a first end connected to the base of the stationary member and a second end connected to the base of the movable member, the at least one temperature actuated member configured to compress at a first temperature and expand at a second temperature.

Disclosed herein is a temperature actuated valve, including a stationary member and a movable member, wherein the stationary member is configured to receive the movable member. A first flow path is defined between an outer surface of the stationary member and an inner surface of a housing and a second flow path defined by and within the movable member. The temperature actuated valve further includes at least one temperature actuated member having a first end seated against a base of the stationary member and a second end seated against a base of the movable member. The temperature actuated valve further includes a bias member having a first end connected to the base of the stationary member and a second end connected to the base of the movable member, the at least one temperature actuated member configured to compress at a first temperature and expand at a second temperature.

A system and method of heating a workpiece to a desired temperature is disclosed. This system and method consider the physical limitations of the temperature device, such as time lag, temperature offset, and calibration, in creating a hybrid approach that heats the workpiece more efficiently. First, the workpiece is heated using open loop control to heat the workpiece to a threshold temperature. After the threshold temperature is reach, a closed loop maintenance mode is utilized. In certain embodiments, an open loop maintenance mode is employed between the open loop warmup mode and the closed loop maintenance mode. Additionally, a method of calibrating a pyrometer using a contact thermocouple is also disclosed.

A system and method of heating a workpiece to a desired temperature is disclosed. This system and method consider the physical limitations of the temperature device, such as time lag, temperature offset, and calibration, in creating a hybrid approach that heats the workpiece more efficiently. First, the workpiece is heated using open loop control to heat the workpiece to a threshold temperature. After the threshold temperature is reach, a closed loop maintenance mode is utilized. In certain embodiments, an open loop maintenance mode is employed between the open loop warmup mode and the closed loop maintenance mode. Additionally, a method of calibrating a pyrometer using a contact thermocouple is also disclosed.

The present device includes a slide valve movable in a chamber along an axis between a closed position, in which the slide valve is pressed axially against a fixed seat, and an open position, in which the slide valve is axially separated from the seat and a thermomechanical actuator, which is able to drive the slide valve depending on the temperature of the fluid in the chamber and which includes both a thermostatic element, including a fixed piston, and a body forming a heat-sensitive part of the thermomechanical actuator, arranged inside the chamber The piston being mounted with the ability to move along the axis on the body so that the piston deploys against the body when the thermally expandable material expands, and a return spring, interposed axially between the casing and the body so as to retract the piston away from the body when the thermally expandable material contracts.

There are provided a throttle mechanism and the like that are capable of easily changing a cross-sectional area of a flow path according to an operating state. The throttle mechanism in an embodiment is a throttle mechanism that controls a flow rate of a fluid flowing through a flow path, and is configured to make a cross-sectional area of the flow path change autonomously according to temperature.