Various examples are provided of low power, rapid response on-device heaters and methods of calibrating the device within a linear operating region, which is reached and maintained through control of the on-device heater. A system to be calibrated includes a sensor to measure the temperature and relative humidity of the system, a heater coupled to the sensor, a heater controller coupled to the heater to control the heater to heat the system, and a processor coupled to the sensor and the heater controller. The processor controls the heater based on temperature measured by the sensor to perform a calibration process for the system including calculating a calibration factor, and to determine whether to abort the calibration process based on relative humidity measured by the sensor indicating that the system is outside the linear operating region.

A raw material supply apparatus includes: a raw material supply path through which a raw material gas is supplied into a processing container; a valve provided in the raw material supply path; a pressure sensor configured to detect an internal pressure of the raw material supply path; a raw material exhaust path connected to the raw material supply path and through which the raw material gas in the raw material supply path is exhausted; an opening degree adjustment mechanism provided in the raw material exhaust path and configured to control the internal pressure of the raw material supply path based on an adjustment of an opening degree of the opening degree adjustment mechanism; and a controller configured to perform the adjustment of the opening degree of the opening degree adjustment mechanism based on a value detected by the pressure sensor.

A raw material supply apparatus includes: a raw material supply path through which a raw material gas is supplied into a processing container; a valve provided in the raw material supply path; a pressure sensor configured to detect an internal pressure of the raw material supply path; a raw material exhaust path connected to the raw material supply path and through which the raw material gas in the raw material supply path is exhausted; an opening degree adjustment mechanism provided in the raw material exhaust path and configured to control the internal pressure of the raw material supply path based on an adjustment of an opening degree of the opening degree adjustment mechanism; and a controller configured to perform the adjustment of the opening degree of the opening degree adjustment mechanism based on a value detected by the pressure sensor.

A sublimator control valve system may include a sublimator having an injection port, a feedwater supply, a first solenoid valve in fluid communication with the feedwater supply and the injection port of the sublimator, a first sensor in electronic communication with a first controller, the first sensor configured to measure at least one of a first pressure parameter or a first temperature parameter; and a first tangible, non-transitory memory configured to communicate with the first controller, the tangible, non-transitory memory having instructions stored thereon that, in response to execution by the first controller, cause the first controller to perform operations comprising receiving, by the first controller, a command signal and the first pressure parameter, and controlling, by the first controller, the first solenoid valve in response to at least one of the command signal or the first pressure parameter.

A nitrogen-oxide (NOx) sensor control system includes a NOx sensor analog front-end, a temperature sensor analog front-end, and a processing system. The NOx sensor analog front-end is adapted to receive analog NOx sensor signals from a NOx sensor and is configured to convert the analog NOx sensor signals to digital NOx sensor signals. The temperature sensor analog front-end is adapted to receive analog temperature sensor signals from a temperature sensor and is configured to convert the analog temperature sensor signals to digital temperature sensor signals. The processing system is coupled to receive the digital NOx sensor signals and the digital temperature sensor signals and is configured, in response thereto, to: supply the digital NOx sensor signals to an external system, and control a flow of current to a heater element in the NOx sensor.

A sublimator control valve system may comprise a sublimator having an injection port, a feedwater supply, a first solenoid valve in fluid communication with the feedwater supply and the injection port of the sublimator, a first sensor in electronic communication with a first controller, the first sensor configured to measure at least one of a first pressure parameter or a first temperature parameter; and a first tangible, non-transitory memory configured to communicate with the first controller, the tangible, non-transitory memory having instructions stored thereon that, in response to execution by the first controller, cause the first controller to perform operations comprising receiving, by the first controller, a command signal and the first pressure parameter, and controlling, by the first controller, the first solenoid valve in response to at least one of the command signal or the first pressure parameter.

A nitrogen-oxide (NOx) sensor control system includes a NOx sensor analog front-end, a temperature sensor analog front-end, and a processing system. The NOx sensor analog front-end is adapted to receive analog NOx sensor signals from a NOx sensor and is configured to convert the analog NOx sensor signals to digital NOx sensor signals. The temperature sensor analog front-end is adapted to receive analog temperature sensor signals from a temperature sensor and is configured to convert the analog temperature sensor signals to digital temperature sensor signals. The processing system is coupled to receive the digital NOx sensor signals and the digital temperature sensor signals and is configured, in response thereto, to: supply the digital NOx sensor signals to an external system, and control a flow of current to a heater element in the NOx sensor.

A system for regulating a temperature of a measurement array is disclosed. The system includes a measurement array including a plurality of sensors, wherein the plurality of sensors are integrated onto an integrated circuit die. The system includes a thermal sensor integrated onto the integrated circuit die, wherein the thermal sensor senses a temperature associated with the plurality of sensors. The system further includes a heat pump coupled to the integrated circuit die, wherein the heat pump is controlled by a feedback control circuit including the thermal sensor.

A Peltier element control device includes a drive circuit, a voltage detector, and a control circuit. The drive circuit supplies a current to the Peltier element. The voltage detector detects a voltage value of a voltage applied to the Peltier element. The control circuit causes the drive circuit to supply a current of a predetermined constant value to the Peltier element, and causes the drive circuit to reduce a magnitude of the current supplied to the Peltier element in a case where a value related to the voltage value detected when the current of the predetermined constant value is supplied to the Peltier element increases.

A system for regulating a temperature of a measurement array is disclosed. The system includes a measurement array including a plurality of sensors, wherein the plurality of sensors are integrated onto an integrated circuit die. The system includes a thermal sensor integrated onto the integrated circuit die, wherein the thermal sensor senses a temperature associated with the plurality of sensors. The system further includes a heat pump coupled to the integrated circuit die, wherein the heat pump is controlled by a feedback control circuit including the thermal sensor.