Patent classifications
G
G06
G06F
2207/00
G06F2207/556
G06F2207/556
Method for rejecting tuning disturbances to improve lamp failure prediction quality in thermal processes
10140394
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2018-11-27
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Embodiments disclosed herein include methods for reducing or eliminating the impact of tuning disturbances during prediction of lamp failure. In one embodiment, the method comprises monitoring data of a lamp module for a process chamber using one or more physical sensors disposed at different locations within the lamp module, creating virtual sensors based on monitoring data of the lamp module, and providing a prediction model for the lamp module using the virtual sensors as inputs.