G11B5/855

Imprint apparatus and method of manufacturing article
09798231 · 2017-10-24 · ·

The present invention provides an imprint apparatus comprising a deforming unit configured to deform a pattern surface by applying a force to a mold, a measuring unit configured to measure a deformation amount of the pattern surface, a control unit configured to control the measuring unit to measure the deformation amount in each of a plurality of states in which a plurality of the forces are applied to the mold, a calculation unit configured to calculate a rate of change in the deformation amount as a function of a change in the force applied to the mold, and a calibration unit configured to calibrate a control profile describing a time in the imprint process, and the force applied to the mold, based on the rate of change in the deformation amount.

Imprint apparatus and method of manufacturing article
09798231 · 2017-10-24 · ·

The present invention provides an imprint apparatus comprising a deforming unit configured to deform a pattern surface by applying a force to a mold, a measuring unit configured to measure a deformation amount of the pattern surface, a control unit configured to control the measuring unit to measure the deformation amount in each of a plurality of states in which a plurality of the forces are applied to the mold, a calculation unit configured to calculate a rate of change in the deformation amount as a function of a change in the force applied to the mold, and a calibration unit configured to calibrate a control profile describing a time in the imprint process, and the force applied to the mold, based on the rate of change in the deformation amount.

Three dimensional data storage medium with a tuned recording layer

A three dimensional magnetic recording medium can consist of a first recording layer vertically stacked with a second recording layer. The first stacked recording layer may be tuned with at least one discrete track physically separating multiple data tracks in the first recording layer or tuned by being configured as a bit patterned media.

Patterned media for heat assisted recording

A patterned magnetic recording medium for use in heat assisted magnetic recording comprises an electrically conductive heat sink layer and a plurality of discrete magnetic recording elements positioned adjacent to a first surface of the heat sink layer. Disc drives that include the patterned medium and a method of magnetic recording using the patterned media are also included.

Patterned media for heat assisted recording

A patterned magnetic recording medium for use in heat assisted magnetic recording comprises an electrically conductive heat sink layer and a plurality of discrete magnetic recording elements positioned adjacent to a first surface of the heat sink layer. Disc drives that include the patterned medium and a method of magnetic recording using the patterned media are also included.

Method for providing heat assisted magnetic recording write apparatus having a near-field transducer with a sloped nose

A method for fabricating a near-field transducer (NFT) for a heat assisted magnetic recording (HAMR) write apparatus is described. The HAMR write apparatus is coupled with a laser for providing energy and has a media-facing surface (MFS) configured to reside in proximity to a media during use. The method includes providing a stack on an underlayer. The stack includes an endpoint detection layer, an optical layer and an etchable layer. The optical layer is between the etchable and endpoint detection layers. The etchable layer is patterned to form a mask. A portion of the optical layer is removed. A remaining portion of the optical layer has a bevel at a bevel angle from the MFS location. The bevel angle is nonzero and acute. The NFT is provided such that the NFT has an NFT front surface adjoining the bevel and at the bevel angle from the MFS location.

Method for providing heat assisted magnetic recording write apparatus having a near-field transducer with a sloped nose

A method for fabricating a near-field transducer (NFT) for a heat assisted magnetic recording (HAMR) write apparatus is described. The HAMR write apparatus is coupled with a laser for providing energy and has a media-facing surface (MFS) configured to reside in proximity to a media during use. The method includes providing a stack on an underlayer. The stack includes an endpoint detection layer, an optical layer and an etchable layer. The optical layer is between the etchable and endpoint detection layers. The etchable layer is patterned to form a mask. A portion of the optical layer is removed. A remaining portion of the optical layer has a bevel at a bevel angle from the MFS location. The bevel angle is nonzero and acute. The NFT is provided such that the NFT has an NFT front surface adjoining the bevel and at the bevel angle from the MFS location.

PERPENDICULAR MAGNETIC RECORDING WITH MULTIPLE ANTIFERROMAGNETICALLY COUPLED LAYERS
20170243605 · 2017-08-24 ·

Provided herein is an apparatus including a top continuous layer and a bottom continuous layer under the top continuous layer. The top continuous layer and the bottom continuous layer are antiferromagnetically coupled. A number of granular columns are under the bottom continuous layer. The number of granular columns include at least a first granular layer under the bottom continuous layer and a second granular layer also under the first granular layer. The first granular layer and the second granular layer are separated by a non-magnetic spacer. The first granular layer and the second granular layer are ferromagnetically coupled. The first granular layer is antiferromagnetically coupled to the bottom continuous layer.

Embedded mask patterning process for fabricating magnetic media and other structures

In some examples, a method comprising depositing a functional layer (e.g., a magnetic layer) over a substrate; depositing a granular layer over the functional layer, the granular layer including a first material defining a plurality of grains separated by a second material defining grain boundaries of the plurality of grains; removing the second material from the granular layer such that the plurality of grains of the granular layer define a hard mask layer on the functional layer; and removing portions of the functional layer not masked by the hard mask layer, wherein the depositing of the functional layer, the depositing of the granular layer, removing the second material, and removing the portions of the functional layer are performed in a vacuum environment.

Embedded mask patterning process for fabricating magnetic media and other structures

In some examples, a method comprising depositing a functional layer (e.g., a magnetic layer) over a substrate; depositing a granular layer over the functional layer, the granular layer including a first material defining a plurality of grains separated by a second material defining grain boundaries of the plurality of grains; removing the second material from the granular layer such that the plurality of grains of the granular layer define a hard mask layer on the functional layer; and removing portions of the functional layer not masked by the hard mask layer, wherein the depositing of the functional layer, the depositing of the granular layer, removing the second material, and removing the portions of the functional layer are performed in a vacuum environment.