A method of fabricating a semiconductor device includes aligning an alignment structure of a wafer to a direction of a magnetic field created by an external electromagnet and depositing a magnetic layer (e.g., NiFe) over the wafer in the presence of the magnetic field and while applying the magnetic field and maintaining a temperature of the wafer below 150° C. An insulation layer (e.g., AlN) is deposited on the first magnetic layer. The alignment structure of the wafer is again aligned to the direction of the magnetic field and a second magnetic layer is deposited on the insulation layer, in the presence of the magnetic field and while maintaining the temperature of the wafer below 150° C.

The disclosure describes multilayer hard magnetic materials including at least one layer including α″-Fe.sub.16N.sub.2 and at least one layer including α″-Fe.sub.16(N.sub.xZ.sub.1-x).sub.2 or a mixture of α″-Fe.sub.16N.sub.2 and α″-Fe.sub.16Z.sub.2, where Z includes at least one of C, B, or O, and x is a number greater than zero and less than one. The disclosure also describes techniques for forming multilayer hard magnetic materials including at least one layer including α″-Fe.sub.16N.sub.2 and at least one layer including α″-Fe.sub.16(N.sub.xZ.sub.1-x).sub.2 or a mixture of α″-Fe.sub.16N.sub.2 and α″-Fe.sub.16Z.sub.2 using chemical vapor deposition or liquid phase epitaxy.

The present invention provides a rare earth thin film magnet having Nd, Fe, and B as essential components, wherein the rare earth thin film magnet has a texture in which an α-Fe phase and a Nd.sub.2Fe.sub.14B phase are alternately arranged three-dimensionally, and each phase has an average crystal grain size of 10 to 30 nm. An object of this invention is to provide a rare earth thin film magnet having superior mass productivity and reproducibility and favorable magnetic properties, as well as to provide the production method thereof and a target for producing the thin film.

An apparatus with a deposition source and a substrate holder having a source mounting portion, which is rotatable about a first axis, a shielding element, which is disposed between the deposition source and the substrate holder, and a drive arrangement. The deposition source has a material outlet opening from which material is emitted. A longitudinal axis of an elongate central region of the material outlet opening extends parallel and centrally between the edges of the material outlet opening. The deposition source is mounted to the source mounting portion such that the longitudinal axis of the central region is parallel to the first axis. The shielding element has an aperture. The drive arrangement controls rotation of the source mounting portion, adjustment of a width of the aperture, and relative movement between the substrate holder and both the source mounting portion and the shielding element.

A product includes an array of cold spray-formed structures. Each of the structures is characterized by having a defined feature size in at least one dimension of less than 100 microns as measured in a plane of deposition of the structure, at least 90% of a theoretical density of a raw material from which the structure is formed, and essentially the same functional properties as the raw material. A product includes a cold spray-formed structure characterized by having a defined feature size in at least one dimension of less than 100 microns as measured in a plane of deposition of the structure, at least 90% of a theoretical density of a raw material from which the structure is formed, and essentially the same functional properties as the raw material.

The present disclosure relates to a method for locomotion of at least one nanorobot through a biochemical environment. The present disclosure also reveals a method for locomotion of nanorobots for use in drug delivery, delivery of materials for medical imaging and medical diagnosis.

Provided is a rare earth thin film magnet having Nd, Fe and B as essential components, which is characterized in that a Nd—Fe—B base film is formed on a Si substrate having an oxide film formed on a surface thereof and has a composition in which the Nd content is higher than that of a stoichiometric composition and that a film (nano composite film) is formed on the base film and has a texture in which an α-Fe phase and Nd.sub.2Fe.sub.14B are alternately arranged and three-dimensionally dispersed. The rare earth thin film magnet provided is less susceptible to the occurrence of film separation and substrate breakage and exhibits favorable magnetic properties.

Provided is a rare earth thin film magnet having Nd, Fe and B as essential components, which is characterized in that a Nd—Fe—B base film is formed on a Si substrate having an oxide film formed on a surface thereof and has a composition in which the Nd content is higher than that of a stoichiometric composition and that a film (nano composite film) is formed on the base film and has a texture in which an α-Fe phase and Nd.sub.2Fe.sub.14B are alternately arranged and three-dimensionally dispersed. The rare earth thin film magnet provided is less susceptible to the occurrence of film separation and substrate breakage and exhibits favorable magnetic properties.

A particle coating method includes a heating step of heating soft magnetic metal particles containing an amorphous phase within a temperature range of 100° C. or higher and 500° C. or lower for 0.1 hours or more and 300 hours or less, and an insulating film formation step of forming an insulating film at surfaces of the soft magnetic metal particles by a chemical vapor deposition method. The soft magnetic metal particles preferably contain the amorphous phase at 50 vol % or more.

When a slurry 41 obtained by dispersing a rare-earth-compound powder in a solvent is applied to sintered magnet bodies 1, and dried to remove the solvent in the slurry and cause the surfaces of the sintered magnet bodies to be coated with the powder, and the sintered magnet bodies coated with the powder are heat treated to cause the rare-earth element to be absorbed by the sintered magnet bodies, the sintered magnet bodies having had the slurry applied thereto are dried by being irradiated with near infrared radiation having a wavelength of 0.8-5 m, to remove the solvent in the slurry, and cause the surfaces of the sintered magnet bodies to be coated with the powder. As a result, the rare-earth-compound powder can be uniformly and efficiently applied to the surfaces of the sintered magnet bodies.