H01J2201/2842

SYSTEM AND APPARATUS FOR STABILIZING ELECTRON SOURCES IN CHARGED PARTICLE SYSTEMS

Apparatuses and systems for stabilizing electron sources in charged particle beam inspection systems are provided. In some embodiments, a system may include an electron source comprising an emitting tip electrically connected to two electrodes and configured to emit an electron; and a base coupled to the emitting tip, wherein the base is configured to stabilize the emitting tip via the coupling.