Patent classifications
H
H01
H01J
2201/00
H01J2201/30
H01J2201/304
H01J2201/30403
H01J2201/30442
H01J2201/30442
Emitter, electron gun in which same is used, electronic device in which same is used, and method for manufacturing same
11984294
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2024-05-14
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The present invention provides an emitter made of a hafnium carbide (HfC) single crystal that stably emits electrons with high efficiency, a method for manufacturing the emitter, and an electron gun and an electronic device using the emitter. An emitter according to an embodiment of the present invention is an emitter including a nanowire, in which the nanowire is made of the hafnium carbide (HfC) single crystal, at least an end of the nanowire through which electrons are to be emitted is coated with hafnium oxycarbide (HfC.sub.1-xO.sub.x: 0<x?0.5), and a field electron emission pattern of the end obtained by a field emission microscope (FEM) is a single spot.