Embodiments of the present disclosure provides methods and systems for preparing a cathode component. The method may include obtaining a three-dimensional (3D) model of the cathode component; obtaining a predetermined parameter, wherein the predetermined parameter includes at least one of a scanning direction of laser, an energy distribution of laser, an output power of laser, or a scanning speed of laser; and controlling a 3D printer to perform, based on the 3D model and the predetermined parameter, a laser scanning on a raw material to obtain the cathode component.

An electron source that can be used stably for a long time even when hexaboride is used, and an electron beam device using the electron source are provided. The invention is directed to an electron source which includes a filament made of a metal, a metal tube that is fixed to the filament and has a plurality of recesses disposed at least in two axial directions so as to surround a central axis at an outer periphery, and a columnar hexaboride tip that emits an electron, is disposed so as to protrude from the inside of the metal tube to a side opposite to the filament, and is in contact with a bottom of each of the plurality of recesses of the metal tube.

According to an embodiment of the present disclosure, a photocathode may include: a mesh having a first surface and a second surface facing away from the first surface, and including metallic, semiconductor or ceramic mesh grid with micron-sized openings in the mesh; a photosensitive film on the first surface of the mesh and extending at least partially into the openings of the mesh; and a graphene layer including one or more graphene sheets on the second surface of the mesh.

An electron source that can be used stably for a long time even when hexaboride is used, and an electron beam device using the electron source are provided. The invention is directed to an electron source which includes a filament made of a metal, a metal tube that is fixed to the filament and has a plurality of recesses disposed at least in two axial directions so as to surround a central axis at an outer periphery, and a columnar hexaboride tip that emits an electron, is disposed so as to protrude from the inside of the metal tube to a side opposite to the filament, and is in contact with a bottom of each of the plurality of recesses of the metal tube.

According to an embodiment of the present disclosure, a photocathode may include: a mesh having a first surface and a second surface facing away from the first surface, and including metallic, semiconductor or ceramic mesh grid with micron-sized openings in the mesh; a photosensitive film on the first surface of the mesh and extending at least partially into the openings of the mesh; and a graphene layer including one or more graphene sheets on the second surface of the mesh.

A method of forming a multi-layer structure comprising may include a step of providing a substrate, a step of depositing a protection layer, a step of depositing a thin film material, and a step of detaching. The substrate may have a low surface energy surface or a low surface energy coating or modification disposed on at least a portion of a substrate to form a low surface energy surface. The step of depositing a protection layer may be performed on at least a portion of the low surface energy surface. The step of detaching may detach the multi-layer structure from the substrate

A vacuum integrated electronic device has an anode region of conductive material; an insulating region on top of the anode region; a cavity extending through the insulating region and having a sidewall; and a cathode region. The cathode region has a tip portion extending peripherally within the cavity, adjacent to the sidewall of the cavity. The cathode region is formed by tilted deposition, carried out at an angle of 30-60 with respect to a perpendicular to the surface of device.

A vacuum integrated electronic device has an anode region of conductive material; an insulating region on top of the anode region; a cavity extending through the insulating region and having a sidewall; and a cathode region. The cathode region has a tip portion extending peripherally within the cavity, adjacent to the sidewall of the cavity. The cathode region is formed by tilted deposition, carried out at an angle of 30-60 with respect to a perpendicular to the surface of device.

An electrode (1) of a discharge device (e.g. the cathode of a discharge lamp) having a side area (4) and a tip area (5) implanted with an emissive material dopant induced by ion implantation is disclosed. The side area (4) of the electrode (1) may be masked (3) during ion implantation or a diffusion barrier layer (7) may be added on the side area (4) after ion implantation.

Embodiments of the present disclosure provides methods and systems for preparing a cathode component. The method may include obtaining a three-dimensional (3D) model of the cathode component; obtaining a predetermined parameter, wherein the predetermined parameter includes at least one of a scanning direction of laser, an energy distribution of laser, an output power of laser, or a scanning speed of laser; and controlling a 3D printer to perform, based on the 3D model and the predetermined parameter, a laser scanning on a raw material to obtain the cathode component.