H01J2237/24435

Charged particle detecting device and charged particle beam system with same

A charged particle detecting device includes: a holding structure; a first charged particle detector at the terminal portion of the holding structure; a second charged particle detector at the terminal portion of the holding structure; a detector head at the terminal portion of the holding structure; and a first electrode which is transmissive for the first and second species of charged particles covering an entrance opening of the detector head.

System for recording spatial and temporal properties of ions emitted from a quadrupole mass filter

An ion detection system for a detecting a quantity of ions exiting from a mass analyzer of a mass spectrometer comprises: (a) photon generating means configured to receive the quantity of ions and to generate a quantity of photons that is proportional to the quantity of ions; (b) a linear array of photo-detectors configured along a line for detecting a variation of a portion of the quantity of generated photons along the line; and (c) an optical system for directing the portion of the quantity of photons from the photon generating means to the linear array of photo-detectors comprising: (c1) a first cylindrical lens having a first lens axis disposed parallel to the line; (c2) a second cylindrical lens or rod lens having a second lens axis disposed parallel to the line; and a doublet lens.

CHARGED PARTICLE DETECTING DEVICE AND CHARGED PARTICLE BEAM SYSTEM WITH SAME
20170032925 · 2017-02-02 ·

A charged particle detecting device is disclosed which includes: a holding structure; a first charged particle detector at the terminal portion of the holding structure, the first charged particle detector being configured to generate a first electrical signal when a first species of charged particles impinges on the first charged particle detector; a second charged particle detector at the terminal portion of the holding structure, the second charged particle detector is configured to generate a second electrical signal when a second species of charged particles impinges on the second charged particle detector; a detector head at the terminal portion of the holding structure, the detector head defining a hollow volume within which a particle entrance surface of the first charged particle detector and a particle entrance surface of the second charged particle detector are arranged; and a first electrode which is transmissive for the first and second species of charged particles covering an entrance opening of the detector head.

Methods for broad-stability mass analysis using a quadrupole mass filter

A method of mass analysis comprises: generating ions from the sample; delivering the ions to a quadrupole; applying a radio frequency voltage, V, to rods of the quadrupole such that the instantaneous electrical potential of each rod is out of phase with each adjacent rod and a non-oscillatory voltage, U, across each pair of adjacent rods such that a subset of the ions having a range of mass-to-charge (m/z) ratios are selectively transmitted through the quadrupole; varying at least one of voltage U and voltage V such that the range of selectively transmitted m/z ratios is caused to vary and varying at least one additional operational parameter; acquiring a data set comprising a series of temporally-resolved images of spatial distribution patterns of transmitted ions at each combination of U, V and the at least one additional operating parameter; and mathematically deconvolving the data set to generate mass spectra.