Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.

The present invention provides a relativistic magnetron including an anode with an entrant channel, the channel having an input end, an output end and a dimensional discontinuity between the ends. The channel is connected to the magnetron and has an anode defining an interaction space located between the dimensional discontinuity and output end. Also provided is a cathode, located upstream, a spaced distance away from the interaction space towards the input end, the cathode is adapted to send an electron beam into the interaction space where the electron beam forms a virtual cathode in the interaction space.

An anode structure for a magnetron provides for low eddy currents and efficient water cooling. The anode structure may be made by machining a bimetal blank including an out layer of a first metal and an inner layer of a second metal and formed by explosion bonding. The second metal has a resistivity lower than first metal and a thermal conductivity higher than the first metal. The machining may result in the anode structure with vanes each having a center (tip) portion made of the second metal and the rest made of the first metal. The machined anode structure may be coated with the second metal.

An anode structure for a magnetron provides for low eddy currents and efficient water cooling. The anode structure may be made by machining a bimetal blank including an out layer of a first metal and an inner layer of a second metal and formed by explosion bonding. The second metal has a resistivity lower than first metal and a thermal conductivity higher than the first metal. The machining may result in the anode structure with vanes each having a center (tip) portion made of the second metal and the rest made of the first metal. The machined anode structure may be coated with the second metal.

An Inverted Cylindrical Magnetron (ICM) System and Methods of Use is disclosed herein generally comprising a co-axial central anode concentrically located within a first annular end anode and a second annular end anode; a process chamber including a top end and a bottom end in which the first annular end anode and the second annular end anode are coaxially disposed, whereby the first annular end anode, the second annular end anode, and the central anode form a 3-anode configuration to provide electric field uniformity, and the process chamber including a central annular space coupled to a tube insulator disposed about the central annular space wall; a cathode concentrically coupled to the tube insulator and a target; and a plurality of multi-zone electromagnets or hybrid electro-permanent magnets surrounding the exterior of the process chamber providing a tunable magnetic field.

An Inverted Cylindrical Magnetron (ICM) System and Methods of Use is disclosed herein generally comprising a co-axial central anode concentrically located within a first annular end anode and a second annular end anode; a process chamber including a top end and a bottom end in which the first annular end anode and the second annular end anode are coaxially disposed, whereby the first annular end anode, the second annular end anode, and the central anode form a 3-anode configuration to provide electric field uniformity, and the process chamber including a central annular space coupled to a tube insulator disposed about the central annular space wall; a cathode concentrically coupled to the tube insulator and a target; and a plurality of multi-zone electromagnets or hybrid electro-permanent magnets surrounding the exterior of the process chamber providing a tunable magnetic field.

An apparatus for generating electromagnetic waves is envisaged relating to the field of electromagnetic wave generating systems. The apparatus provides efficient radio frequency amplification, facilitates low loss electromagnetic generation, enables efficient utilization of kinetic energy of electrons, and works for different radio frequencies. The apparatus comprises an evacuated envelope, a pair of metal plates, a resonator, an electron gun, a magnetic field generator, and a pick-up loop. The evacuated envelope defines a space therewithin. The pair of metal plates defines a passage therebetween. The resonator is coupled to the pair of metal plates. The electron gun emits controlled bursts of electrons into the passage. The magnetic field generator is configured to generate electromagnetic waves. The pick-up loop extracts the generated electromagnetic waves.

There is provided an anode for a magnetron, the anode comprising: a cylindrical shell defining a longitudinal axis, a centre of the shell for accommodating a cathode of the magnetron; a plurality of vanes arranged at angular intervals around the shell, wherein an angular separation between each vane and its adjacent vane is configured to provide a cavity resonator of the magnetron, wherein each vane has a width extending radially inwardly from the shell toward the centre of the shell, and has a length extending longitudinally in parallel with the longitudinal axis of the shell; and a plurality of annular strap rings for setting a resonant mode spectrum of the cavity resonator, wherein the strap rings are arranged at longitudinal intervals and concentrically with the longitudinal axis of the shell, wherein alternate vanes are configured to support the alternate strap rings, such that each vane couples alternate strap rings and each strap ring couples alternate vanes, wherein a cross-sectional dimension of at least a first strap ring of the plurality of strap rings is different from the cross-sectional dimension of at least a second strap ring of the plurality of strap rings.

There is provided an anode for a magnetron, the anode comprising: a cylindrical shell defining a longitudinal axis, a centre of the shell for accommodating a cathode of the magnetron; a plurality of vanes arranged at angular intervals around the shell, wherein an angular separation between each vane and its adjacent vane is configured to provide a cavity resonator of the magnetron, wherein each vane has a width extending radially inwardly from the shell toward the centre of the shell, and has a length extending longitudinally in parallel with the longitudinal axis of the shell; and a plurality of annular strap rings for setting a resonant mode spectrum of the cavity resonator, wherein the strap rings are arranged at longitudinal intervals and concentrically with the longitudinal axis of the shell, wherein alternate vanes are configured to support the alternate strap rings, such that each vane couples alternate strap rings and each strap ring couples alternate vanes, wherein a cross-sectional dimension of at least a first strap ring of the plurality of strap rings is different from the cross-sectional dimension of at least a second strap ring of the plurality of strap rings.

There is provided herein an anode for a magnetron, the anode comprising: a cylindrical shell defining a longitudinal axis, a centre of the shell for accommodating a cathode of the magnetron; a plurality of vanes arranged at angular intervals around the shell, wherein an angular separation between each vane and its adjacent vane is configured to provide a cavity resonator of the magnetron, wherein each vane has a width extending radially inwardly from the shell toward the centre of the shell, and has a length continuously extending longitudinally in parallel with the longitudinal axis of the shell; and a plurality of annular strap rings for setting a resonant mode spectrum of the cavity resonator, wherein the strap rings are arranged at longitudinal intervals and concentrically with the longitudinal axis of the shell, wherein each vane comprises an inner vane segment arranged to face the cathode and a respective outer vane segment connected to the inner vane segment and interposed between the inner vane segment and the shell, and wherein the plurality of vanes are configured to support the plurality of strap rings between the respective inner and outer vane segments such that each vane couples alternate strap rings and each strap ring couples alternate vanes.