Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.

Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.

There is provided herein an anode for a magnetron, the anode comprising: a cylindrical shell defining a longitudinal axis, a centre of the shell for accommodating a cathode of the magnetron; a plurality of vanes arranged at angular intervals around the shell, wherein an angular separation between each vane and its adjacent vane is configured to provide a cavity resonator of the magnetron, wherein each vane has a width extending radially inwardly from the shell toward the centre of the shell, and has a length continuously extending longitudinally in parallel with the longitudinal axis of the shell; and a plurality of annular strap rings for setting a resonant mode spectrum of the cavity resonator, wherein the strap rings are arranged at longitudinal intervals and concentrically with the longitudinal axis of the shell, wherein each vane comprises an inner vane segment arranged to face the cathode and a respective outer vane segment connected to the inner vane segment and interposed between the inner vane segment and the shell, and wherein the plurality of vanes are configured to support the plurality of strap rings between the respective inner and outer vane segments such that each vane couples alternate strap rings and each strap ring couples alternate vanes.

Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.

Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.

Frequency adjustable quarter-wavelength resonators have a movable end wall defined by a surface of a sphere that is moved within the resonator tube. The sphere can be ferromagnetic, enabling it to be moved by magnetic interactions with moving external magnetic elements, or by a variable external magnetic field, controlled by power modulation to external electromagnets. The resonators can optionally be helical or otherwise curved, and the spherical shape of the structure forming the end wall enables it to navigate curves in the resonator tube.

Frequency adjustable quarter-wavelength resonators have a movable end wall defined by a surface of a sphere that is moved within the resonator tube. The sphere can be ferromagnetic, enabling it to be moved by magnetic interactions with moving external magnetic elements, or by a variable external magnetic field, controlled by power modulation to external electromagnets. The resonators can optionally be helical or otherwise curved, and the spherical shape of the structure forming the end wall enables it to navigate curves in the resonator tube.

Frequency adjustable quarter-wavelength resonators have a movable end wall defined by a surface of a sphere that is moved within the resonator tube. The sphere can be ferromagnetic, enabling it to be moved by magnetic interactions with moving external magnetic elements, or by a variable external magnetic field, controlled by power modulation to external electromagnets. The resonators can optionally be helical or otherwise curved, and the spherical shape of the structure forming the end wall enables it to navigate curves in the resonator tube.

Frequency adjustable quarter-wavelength resonators have a movable end wall defined by a surface of a sphere that is moved within the resonator tube. The sphere can be ferromagnetic, enabling it to be moved by magnetic interactions with moving external magnetic elements, or by a variable external magnetic field, controlled by power modulation to external electromagnets. The resonators can optionally be helical or otherwise curved, and the spherical shape of the structure forming the end wall enables it to navigate curves in the resonator tube.

Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.