An electron tube includes a housing that is internally held in a vacuum and has a window transmitting an electromagnetic wave, an electron emitting unit that is disposed in the housing and has a meta-surface emitting electrons in response to incidence of the electromagnetic wave, an electron multiplying unit that is disposed in the housing and multiplies the electrons emitted from the electron emitting unit, and an electron collecting unit that is disposed in the housing and collects the electrons multiplied by the electron multiplying unit. The window contains at least one selected from quartz, silicon, germanium, sapphire, zinc selenide, zinc sulfide, magnesium fluoride, lithium fluoride, barium fluoride, calcium fluoride, magnesium oxide, and calcium carbonate.

A vacuum processing apparatus 1 includes a processing chamber 3 that can bring an inside of the processing chamber into a vacuum state, a load lock chamber 2 that is coupled to the processing chamber 3 and that is switchable between an atmospheric state and the vacuum state, a communication unit 10 configured to communicate the processing chamber 3 and the load lock chamber 2, a stage 5 on which a processing object 9 is placed, the stage being movable between the processing chamber 3 and the load lock chamber 2 through the communication unit 10, and a sealing unit 6 fixed to the stage 5, the sealing unit being larger than an opening 300 of the communication unit 10 on a side of the processing chamber 3.

In an embodiment, a system is provided that includes an electron gun, a focusing system, and a housing. The electron gun can include a cold cathode electron source and an extraction electrode. The focusing system can be configured to focus a beam of electrons extracted from the electron gun to a focal region. The housing can include the electron gun and extend along a housing axis in the direction of the electron beam. The cold cathode source is configured to emit electrons at a first operating pressure that is higher than a second operating pressure at the focal region of the electron beam.

A vacuum processing apparatus 1 includes a processing chamber 3 that can bring an inside of the processing chamber into a vacuum state, a load lock chamber 2 that is coupled to the processing chamber 3 and that is switchable between an atmospheric state and the vacuum state, a communication unit 10 configured to communicate the processing chamber 3 and the load lock chamber 2, a stage 5 on which a processing object 9 is placed, the stage being movable between the processing chamber 3 and the load lock chamber 2 through the communication unit 10, and a sealing unit 6 fixed to the stage 5, the sealing unit being larger than an opening 300 of the communication unit 10 on a side of the processing chamber 3.

An electron tube includes a housing that is internally held in a vacuum and has a window transmitting an electromagnetic wave, an electron emitting unit that is disposed in the housing and has a meta-surface emitting electrons in response to incidence of the electromagnetic wave, an electron multiplying unit that is disposed in the housing and multiplies the electrons emitted from the electron emitting unit, and an electron collecting unit that is disposed in the housing and collects the electrons multiplied by the electron multiplying unit. The window contains at least one selected from quartz, silicon, germanium, sapphire, zinc selenide, zinc sulfide, magnesium fluoride, lithium fluoride, barium fluoride, calcium fluoride, magnesium oxide, and calcium carbonate.

The embodiments of the present application relate to an ultraviolet cathode ray tube, which comprises: a glass shell, a light-emitting structure layer and an electron gun. The glass shell comprises a tubular part, a fluorescent screen part and a sealing part. The electron gun is arranged inside the tubular part and configured to emit electron beams to the fluorescent screen part. The light-emitting structure layer is arranged on the fluorescent screen part, and the light-emitting structure layer emits ultraviolet light under the excitation of the electron beam. The materials of the fluorescent screen part, the tubular part and the sealing part are all quartz glass or sapphire crystals. The sealing part is formed by deforming an end of the tubular part.