Patent classifications
H
H01
H01J
31/00
H01J31/08
H01J31/26
H01J31/28
H01J31/30
H01J31/32
H01J31/32
Showerhead with interlaced gas feed and removal and methods of use
11189502
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2021-11-30
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Gas distribution modules comprising a housing with an upper plenum and a lower plenum are described. One of the upper plenum and lower plenum is in fluid communication with an inlet and the other is in fluid communication with an outlet. A plurality of upper passages connects the upper plenum to the bottom of the housing to allow a flow of gas to pass through and be isolated from the first plenum.