In one example, a lift assembly may exert a force on a rotatable anode of an X-ray source. The lift assembly may include a lift shaft and a lift electromagnet. The lift shaft may be coupled to an anode and configured to rotate around an axis of rotation of the anode. The lift electromagnet may be configured to apply a magnetic force to the lift shaft in a radial direction. The lift electromagnet may include a coupling portion extending between an interior of a vacuum envelope and an exterior of the vacuum envelope and a winding portion coupled to the coupling portion. Windings may at least partially surround the winding portion.

The disclosure relates to a rotating-anode bearing for an X-ray tube comprising a rotor shaft extending along a longitudinal axis from a first axial end to a second axial end and supported to be rotatable about the longitudinal axis; wherein the rotor shaft has an anode holder in the area of the first axial end; and the anode holder comprises a flange which has a larger diameter than at least an adjacent section of the rotor shaft.

The rotating-anode bearing according to the disclosure wherein the rotor shaft together with the flange is made as an integrally forged part.

In one example, a lift assembly may exert a force on a rotatable anode of an X-ray tube. The lift assembly may include a lift shaft and a lift electromagnet. The lift shaft may be coupled to the anode and may be configured to rotate around an axis of rotation of the anode. The lift electromagnet may be configured to apply a magnetic force to the lift shaft in a radial direction. The lift electromagnet may include a first pole and a second pole oriented towards the lift shaft. Windings may be positioned around the first pole. The lift assembly may include a heat dissipating structure.

In the present invention, a flat emitter is formed by the formation of emitter material wires into a unitary non-porous flat emitter structure. The wires are formed with increased yield and tensile strength as a result of the manner of the formation of the emitter material or metal into the wires that is transferred to the flat emitter. To form the flat emitter, the wires are encapsulated and subjected to sufficient temperatures and pressure in a hot isostatic pressing treatment/process to increase the density of the wires into a solid sheet without the presence of voids or pores in the sheet. In forming the emitter sheet in this manner, the strength properties from the wires are retained within the sheet to provide the emitter with increased creep resistance and a consequently longer useful life in the x-ray tube.

In one example, a lift assembly may exert a force on a rotatable anode of an X-ray tube. The lift assembly may include a lift shaft and a lift electromagnet. The lift shaft may be coupled to the anode and may be configured to rotate around an axis of rotation of the anode. The lift electromagnet may be configured to apply a magnetic force to the lift shaft in a radial direction. The lift electromagnet may include a first pole and a second pole oriented towards the lift shaft. Windings may be positioned around the first pole. The lift assembly may include a heat dissipating structure.

In one example, a lift assembly may exert a force on a rotatable anode of an X-ray source. The lift assembly may include a lift shaft and a lift electromagnet. The lift shaft may be coupled to an anode and configured to rotate around an axis of rotation of the anode. The lift electromagnet may be configured to apply a magnetic force to the lift shaft in a radial direction. The lift electromagnet may include a coupling portion extending between an interior of a vacuum envelope and an exterior of the vacuum envelope and a winding portion coupled to the coupling portion. Windings may at least partially surround the winding portion.

Some embodiments include a system, comprising: an enclosure configured to enclose a vacuum; a cathode disposed within the enclosure; an anode disposed within the enclosure configured to receive a beam of electrons from the cathode; a motor disposed within the enclosure and configured to rotate the anode in response to a drive input; and a circuit electrically connected to the drive input, and configured to generate a phase signal based on a voltage of the drive input and a current of the drive input, the phase signal indicating a phase difference between the voltage of the drive input and the current of the drive input.

Methods and systems for realizing a high speed, rotating anode based x-ray illumination source suitable for high throughput x-ray metrology are presented herein. A high speed rotating anode includes a water cooled rotating platen supported by radial and thrust air bearings employing cascaded differential pumping. A very high bending stiffness of the rotating assembly is achieved by spacing radial air bearings far apart and locating a rotary motor and thrust bearings between the radial air bearings. The high bending stiffness increases the mechanical stability of the rotating assembly during high speed operation, and thus decreases vibration at the location of impingement of the electron beam on the rotating anode material. In some embodiments, magnetic thrust bearings are employed and the air gap is controlled to maintain a desired gap over an operational range of up to three millimeters.

Methods and systems for realizing a high speed, rotating anode based x-ray illumination source suitable for high throughput x-ray metrology are presented herein. A high speed rotating anode includes a water cooled rotating platen supported by radial and thrust air bearings employing cascaded differential pumping. A very high bending stiffness of the rotating assembly is achieved by spacing radial air bearings far apart and locating a rotary motor and thrust bearings between the radial air bearings. The high bending stiffness increases the mechanical stability of the rotating assembly during high speed operation, and thus decreases vibration at the location of impingement of the electron beam on the rotating anode material. In some embodiments, magnetic thrust bearings are employed and the air gap is controlled to maintain a desired gap over an operational range of up to three millimeters.

An X-ray tube is provided. The X-ray tube includes a bearing configured to couple to an anode. The bearing includes a stationary member, a rotary member configured to rotate with respect to the stationary member during operation of the X-ray tube, and a support feature configured to minimize bending moment along a surface of the stationary member to reduce deflection of the stationary member relative to the rotary member due to radial loads during operation of the X-ray tube.