An X-ray target assembly includes a cylindrical base and a cylindrical multilayered X-ray target that includes at least a heat transfer layer, an X-ray source layer and an adhesion layer provided between the heat transfer layer and the X-ray source layer , wherein the X-ray target is oriented such that the heat transfer layer is closest to the base, wherein the X-ray target is placed on top of a cylindrical carrying element, wherein the in-plane coefficient of thermal expansion of each of the heat transfer layer, the X-ray source layer, the adhesion layer and of the material of the carrying element is different, wherein the in-plane coefficient of thermal expansion of the heat transfer layer is the lowest and that of the material of the carrying element the highest.

A system for generating X-ray beams from a liquid target includes a vacuum chamber, a diamond window assembly, an electron source, a target material flow system, and an X-ray detector/imager. An electron beam from the electron source travels through the diamond window assembly and into a dynamic target material of the flow system. Preferably, the dynamic target material is lead bismuth eutectic in a liquid state. Upon colliding with the dynamic target material, X-rays are generated. The generated X-rays exit through an X-ray exit window to be captured by the X-ray detector/imager. Since the dynamic target material is constantly in fluid motion within a pipeline of the flow system, the electron beam always has a new target area which is at a controlled operational temperature and thus, prevents overheating issues. By providing a small focus area for the electron beams, the overall imaging resolution of the X-rays is also improved.

Provided are a scanning-type X-ray source and an imaging system therefor. The scanning-type X-ray source comprises a vacuum cavity (1), wherein a cathode (2) and a plurality of anode target structures (3) are arranged in the vacuum cavity (1); a gate electrode (4) is arranged in a position, close to the cathode (2), in the vacuum cavity (1); a focusing electrode (5) is arranged in a position, close to the gate electrode (4), in the vacuum cavity (1); and a deflection coil (6) is arranged in a position, close to the gate electrode (4), at the outer periphery of the vacuum cavity (1). The scanning-type X-ray source generates electron beams by using cathode (2), controls the powering-on/off of the electron beams by the gate electrode (4), and the deflection coil (6) controls the direction of motion of the electron beams, so as to complete the switching between multiple focuses.

A cooling system used in an X-ray generator having a cathode and anode that includes a target having a focal spot, wherein heat is generated in the anode and focal spot during operation of the X-ray generator. The system includes a heat transfer element attached to the anode wherein the heat transfer element includes a plurality of fin elements that transfer heat from the anode to surrounding air to cool the anode. The system also includes a liquid channel formed in the anode, wherein the liquid channel includes a cooling liquid. The liquid channel is located adjacent the target wherein heat from the focal spot is transferred to the cooling liquid to cool the focal spot wherein the heat transfer element, liquid channel and anode are unistructurally formed. Further, the cooling system includes a circulation pump that moves the cooling liquid in the liquid channel.

Technology is described for an anode including a substrate, a target, and an anode shield. The substrate including a substrate material includes a first portion with a first cross-sectional dimension, and a second portion with a second cross-sectional dimension greater than the first cross-sectional dimension. The target includes a target material attached to a first surface of the first portion of the substrate. The anode shield includes a shield material attached to a second surface of the second portion of the substrate, and the substrate material differs from the target material and the shield material.

The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.

A method and a device for determining the material properties of a polycrystalline, in particular metallic, product during production or quality control of the polycrystalline, in particular metallic, product by means of X-ray diffraction using at least one X-ray source and at least one X-ray detector. In this case, an X-ray generated by the X-ray source is directed onto a surface of the polycrystalline product and the resulting diffraction image of the X-ray is recorded by the X-ray detector. After exiting the X-ray source, the X-ray is passed through an X-ray mirror, wherein the X-ray is both monochromatized and focused, by the X-ray mirror, in the direction of the polycrystalline product and/or the X-ray detector, and then reaches a surface of the metallic product.

A system for generating X-ray beams from a liquid target includes a vacuum chamber, a diamond window assembly, an electron source, a target material flow system, and an X-ray detector/imager. An electron beam from the electron source travels through the diamond window assembly and into a dynamic target material of the flow system. Preferably, the dynamic target material is lead bismuth eutectic in a liquid state. Upon colliding with the dynamic target material, X-rays are generated. The generated X-rays exit through an X-ray exit window to be captured by the X-ray detector/imager. Since the dynamic target material is constantly in fluid motion within a pipeline of the flow system, the electron beam always has a new target area which is at a controlled operational temperature and thus, prevents overheating issues. By providing a small focus area for the electron beams, the overall imaging resolution of the X-rays is also improved.

An anode for an X-ray tube is provided. The anode has a shape configured such that, in use: an electron beam impinges upon the anode at a focal spot on the surface of the anode, and the anode is heated by the electron beam from a first state to a predetermined second state and undergoes resulting thermal expansion causing a change in the location of the focal spot on the surface of the anode, wherein the configured shape of the anode is such that the spatial position of the focal spot with respect to the X-ray tube is substantially the same for the first state and the second state. A method of producing an anode for an X-ray tube is also provided.

According to some aspects, a carrier configured for use with a broadband x-ray source comprising an electron source and a primary target arranged to receive electrons from the electron source to produce broadband x-ray radiation in response to electrons impinging on the primary target is provided. The carrier comprising a housing configured to be removeably coupled to the broadband x-ray source and configured to accommodate a secondary target capable of producing monochromatic x-ray radiation in response to incident broadband x-ray radiation, the housing comprising a transmissive portion configured to allow broadband x-ray radiation to be transmitted to the secondary target when present, and a blocking portion configured to absorb broadband x-ray radiation.