H
ELECTRICITY
H
ELECTRICITY
H01
ELECTRIC ELEMENTS
H01
ELECTRIC ELEMENTS
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/30
Electron-beam or ion-beam tubes for localised treatment of objects
H01J37/30
Electron-beam or ion-beam tubes for localised treatment of objects
H01J37/317
for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
H01J37/317
for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation