A measuring device includes an ionization chamber where air is contained and a measurement value relating to radiation including a neutron ray and a gamma ray is measured, a detector that detects a detection value relating to the neutron ray, and a controller that calculates a dose of the gamma ray based on the measurement value measured in the ionization chamber and the detection value detected by the detector.

A Detection element includes a substrate having a first surface and a second surface opposing the first surface, substrate comprising: a substrate provided with a through hole having inner diameters that differ from each other at two points along the thickness of substrate; a through electrode disposed in through hole; a first electrode connected to through electrode and disposed on the first surface; a patterned electrode connected to through electrode and disposed on the second surface; and a second electrode disposed on the first surface and spaced apart from the first electrode.

A Detection element includes a substrate having a first surface and a second surface opposing the first surface, substrate comprising: a substrate provided with a through hole having inner diameters that differ from each other at two points along the thickness of substrate; a through electrode disposed in through hole; a first electrode connected to through electrode and disposed on the first surface; a patterned electrode connected to through electrode and disposed on the second surface; and a second electrode disposed on the first surface and spaced apart from the first electrode.

A method for detecting particles in a gas of a process environment present in a process chamber, the method comprising the steps of: guiding the gas with the particles into an ionization and charging unit (11) being in fluid communication with the process chamber, wherein the ionization and charging unit has an anode (12) and a cathode (13) and is adapted and configured to at least partly ionize said gas and to charge at least some of said particles; igniting and sustaining a discharge in said gas by applying a voltage between said anode and said cathode of the ionization and charging unit; measuring a current flowing from or to the anode and/or from and to the cathode; detecting the particles based on an AC component or a transient of the measured current. The invention is further directed to an apparatus for detecting particles, to a coating system comprising such an apparatus and to a use of ionization unit.

A method for detecting particles in a gas of a process environment present in a process chamber, the method comprising the steps of: guiding the gas with the particles into an ionization and charging unit (11) being in fluid communication with the process chamber, wherein the ionization and charging unit has an anode (12) and a cathode (13) and is adapted and configured to at least partly ionize said gas and to charge at least some of said particles; igniting and sustaining a discharge in said gas by applying a voltage between said anode and said cathode of the ionization and charging unit; measuring a current flowing from or to the anode and/or from and to the cathode; detecting the particles based on an AC component or a transient of the measured current. The invention is further directed to an apparatus for detecting particles, to a coating system comprising such an apparatus and to a use of ionization unit.